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TAMA-TLO,LTD.
| TAMA-TLO,LTD. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20080257723 | Physical Vapor Deposition System - A physical vapor deposition system for making microparticles generated by using a non-transfer type plasma torch not generating an outgas even in an ultra-high vacuum environment accelerate by a supersonic gas flow and depositing microparticles on a substrate to form a coating film is provided. Provision is made of an evaporation chamber ( | 10-23-2008 |