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TAIWAN SEMCONDUCTOR MANUFACTURING COMPANY, LTD.

TAIWAN SEMCONDUCTOR MANUFACTURING COMPANY, LTD. Patent applications
Patent application numberTitlePublished
20110108928METHOD FOR FORMING HIGH-K METAL GATE DEVICE - The present disclosure provides a method of fabricating a semiconductor device that includes providing a semiconductor substrate, forming a metal gate on the substrate, the metal gate having a first gate resistance, removing a portion of the metal gate thereby forming a trench; and forming a conductive structure within the trench such that a second gate resistance of the conductive structure and remaining portion of the metal gate is lower than the first gate resistance.05-12-2011