20130169300 | MULTI-CHIP PROBER, CONTACT POSITION CORRECTION METHOD THEREOF, AND READABLE RECORDING MEDIUM - Three axial coordinate positions and the rotational position of electrode pads of chips to be inspected on a moving platform are controlled in such a manner that the electrode pads will correspond to the tip position of a plurality of probes, a large number of probes of a probe card, and electrode pads of a large number of chips, whose positional accuracy after being cut is uneven, can be positioned with accuracy, thus largely increasing the number of chips for simultaneous contact, and thus increasing the efficiency for the test. | 07-04-2013 |