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Sumitono Electric Industries, Ltd.
| Sumitono Electric Industries, Ltd. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100242844 | HOLDER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT - A holder for semiconductor manufacturing equipment is provided, in which electrical leakage and sparks do not occur across the electrode terminals and lead wires to supply power to a resistive heating element embedded in a holder, and the thermal uniformity in the holder is within ±1.0%. | 09-30-2010 |