| Sputtering Components, Inc. Patent applications |
| Patent application number | Title | Published |
|---|
| 20110155568 | INDEXING MAGNET ASSEMBLY FOR ROTARY SPUTTERING CATHODE - A magnet assembly for a rotary cathode having a rotatable target cylinder is provided. The magnet assembly comprises a coolant tube configured to be positioned within the target cylinder, and a magnet bar configured to be positioned within the target cylinder and extending substantially parallel to the coolant tube. The magnet bar moves laterally with respect to the target cylinder in a synchronous manner with rotation of the target cylinder. | 06-30-2011 |
| 20110024987 | MECHANICAL SEAL ASSEMBLY FOR A ROTATABLE SHAFT - A mechanical seal assembly for a rotatable shaft is disclosed. In one embodiment, the mechanical seal assembly comprises a first sealing element configured to surround a rotatable shaft, the first sealing element including an annular plate, and a plurality of annular rings that protrude from the annular plate in a direction substantially parallel to the rotatable shaft. The annular rings are concentric with the rotatable shaft. A second sealing element is configured to surround the rotatable shaft, with the second sealing element including one or more springs that provide a biasing force against the first sealing element such that substantially constant contact is maintained between the annular rings and a sealing surface. One or more lubricant cavities are defined between the annular rings and the sealing surface. | 02-03-2011 |
| 20100243428 | ROTARY CATHODE FOR MAGNETRON SPUTTERING APPARATUS - A rotary cathode for a magnetron sputtering apparatus is disclosed. The rotary cathode comprises a rotatable target cylinder, and a non-rotatable interior structure in the target cylinder. The interior structure has an outer surface and an inner passageway. An outer passageway is defined between an inner surface of the target cylinder and the outer surface of the interior structure. An end cap is affixed at a distal end of the target cylinder. A rotating aperture is adjacent to an inner surface of the target cylinder at the distal end thereof, with the rotating aperture configured to direct a fluid toward the inner surface at the distal end. A fluid pathway is at least partially defined by the end cap, with the pathway providing fluid communication between the outer passageway and the inner passageway through the rotating aperture. | 09-30-2010 |
