| 20110271412 | Method for Measuring a Piezoelectric Response by Means of a Scanning Probe Microscope - The piezoelectric response of a sample is measured by applying a scanning probe microscope, whose probe is in contact with the sample The probe is mounted to a cantilever and an actuator is driven by a feedback loop to oscillate at a resonance frequency f. An AC voltage with principally the same frequency f but with a phase (with respect to the oscillation) and/or amplitude varying periodically with a frequency fmod is applied to the probe for generating a piezoelectric response of the sample A lock-in detector measures the spectral components at the frequency fmod of the control signals (K, f) of the feedback loop. These components describe the piezoelectric response and can be recorded as output signals of the device. The method allows a reliable operation of the resonator at its resonance frequency and provides a high sensitivity. | 11-03-2011 |