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SODIFF ADVANCED MATERIALS CO., LTD.
| SODIFF ADVANCED MATERIALS CO., LTD. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20090142248 | Method For Purifying Nitrogen Trifluoride - A highly pure nitrogen trifluoride having a carbon tetrafluoride content of 10 ppm or less can be effectively obtained by boiling crude liquid nitrogen trifluoride having carbon tetrafluoride contaminant under a pressure ranging from 35 to 45 atm, to remove carbon tetrafluoride therefrom through vaporization. | 06-04-2009 |