Inventors list

Assignees list

Classification tree browser

Top 100 Inventors

Top 100 Assignees


Shibaura Mechatronics Corp., Ltd.

Yokohama-shi, JP

Shibaura Mechatronics Corp., Ltd. Patent applications
Patent application numberTitlePublished
20090325390Cleaning method by electrolytic sulfuric acid and manufacturing method of semiconductor device - The cleaning method by electrolytic sulfuric acid and the manufacturing method of semiconductor device comprising: 12-31-2009
20090321272Sulfuric acid electrolysis process - Sulfuric acid electrolysis process wherein; 12-31-2009
20090321252Sulfuric acid electrolytic cell and a sulfuric acid recycle type cleaning system applying the sulfuric acid electrolytic cell - In a sulfuric acid electrolytic cell to electrolyze sulfuric acid supplied to an anode compartment and a cathode compartment comprising a diaphragm, said anode compartment and said cathode compartment separated by said diaphragm, a cathode provided in said cathode compartment and a conductive diamond anode provided in said anode compartment, as said conductive diamond anode, a conductive diamond film is formed on the surface of said conductive substrate, the rear face of said conductive substrate is pasted, with conductive paste, on an current collector comprising a rigid body with size equal to, or larger than, said conductive substrate, an anode compartment frame constituting said anode compartment is contacted via gasket with the periphery on the side of the conductive diamond film of said diamond anode, said diaphragm is contacted with the front face of said anode compartment, further, with the front face of said diaphragm, the cathode compartment frame constituting said cathode compartment, a gasket, and said cathode are contacted in sequence, the rear face of said cathode is pasted with conductive paste to the current collector comprising a rigid body with size equal to, or larger than, said cathode and electric power is supplied from one current collector to the other current collector via said conductive paste.12-31-2009