20120319579 | Atmospheric Plasma Apparatus and Manufacturing Method Thereof - An atmospheric plasma apparatus and a method for manufacturing the same are disclosed. The atmospheric plasma apparatus includes an anode, a cathode, and an insulation medium disposed between the anode and the cathode. An ionizable gas is filled between the anode and the cathode. The cathode includes a plurality of plasma generating and removing units, each of which includes a plasma generating region and a plasma removing region. The plasma generating regions and the plasma removing regions are distributed uniformly and equal to each other in area. Any two plasma removing regions among every three plasma removing regions which are adjacent to each other have a same center-to-center distance. In this way, erosion caused by the plasma to the cathode and the insulation medium may be reduced to prolong the service life of the atmospheric plasma apparatus, and uniformity of cleaning of a substrate surface may be improved. | 12-20-2012 |