20110316073 | SOI CMOS DEVICE HAVING VERTICAL GATE STRUCTURE - The present invention discloses an SOI CMOS device having a vertical gate structure, comprising: an SOI substrate, and an NMOS region and a PMOS region grown on the SOI substrate, wherein the NMOS region and the PMOS region share one vertical gate region, said vertical gate region lying in the same plane as the NMOS region and the PMOS region and between the NMOS region and the PMOS region; a gate oxide layer is arranged between the vertical gate region and the NMOS region for isolation; and a gate oxide layer is arranged between the vertical gate region and the PMOS region for isolation. The present invention occupies small area, contains less pattern layers, requires a simple process, has an open body region that can completely avoid the floating effect of the traditional SOI CMOS device, and is convenient to parasitic resistance and capacitance tests. | 12-29-2011 |