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Seoul National University Research and Development Business Foundation (SNU R&DB FOUNDATI
| Seoul National University Research and Development Business Foundation (SNU R&DB FOUNDATI Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100055620 | NANOSTRUCTURE FABRICATION - Techniques for fabricating nanostructures are provided. In one embodiment a method includes forming a multilayer stack including at least one pair of a structural layer and a sacrificial layer on a substrate, patterning the multilayer stack in order to fabricate a nanostructure, and releasing the nanostructure from the patterned multilayer stack. | 03-04-2010 |