Seoul National University Research and Development Business Foundation (SNU R&DB FOUNDATI
Seoul National University Research and Development Business Foundation (SNU R&DB FOUNDATI Patent applications | ||
Patent application number | Title | Published |
---|---|---|
20100055620 | NANOSTRUCTURE FABRICATION - Techniques for fabricating nanostructures are provided. In one embodiment a method includes forming a multilayer stack including at least one pair of a structural layer and a sacrificial layer on a substrate, patterning the multilayer stack in order to fabricate a nanostructure, and releasing the nanostructure from the patterned multilayer stack. | 03-04-2010 |