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SEMICOA

SEMICOA Patent applications
Patent application numberTitlePublished
20090057801Back-Illuminated, Thin Photodiode Arrays with Trench Isolation - Back-illuminated, thin photodiode arrays with trench isolation. The trenches are formed on one or both sides of a substrate, and after doping the sides of the trenches, are filled to provide electrical isolation between adjacent photodiodes. Various embodiments of the photodiode arrays and methods of forming such arrays are disclosed.03-05-2009