| 20100097431 | PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS - A piezoelectric element includes a substrate, a lower electrode formed above the substrate, a piezoelectric layer formed above the lower electrode, an upper electrode formed above the piezoelectric layer, a protection layer formed on the lateral sides of the piezoelectric layer, and a self-organized monomolecular film formed on the side of each of the protection layer not facing the piezoelectric layer. | 04-22-2010 |
