| 20110016972 | MICROELECTROMECHANICAL INERTIAL SENSOR WITH ATMOSPHERIC DAMPING - The present invention relates to an inertial sensor, preferably an acceleration sensor or multi-axis acceleration sensor as a microelectromechanical construction element, said sensor comprising a housing with at least one first gas-filled cavity in which a first detection unit is disposed moveably relative to the housing for detection of an acceleration to be detected, wherein the inertial sensor comprises a damping structure. | 01-27-2011 |
