| ScanNanoTek Oy Patent applications |
| Patent application number | Title | Published |
|---|
| 20110277808 | MEMS SOLAR CELL DEVICE AND ARRAY - A microelectromechanical system (MEMS) solar cell device. The MEMS solar cell device includes a substrate, a sensing membrane exposed to light radiation being spaced from the substrate, a collector electrode disposed between the substrate and the sensing membrane, and a cavity defined between the sensing membrane and the collector electrode. The collector electrode collects charge carriers generated by light radiation on the sensing membrane within the cavity. A solar module or panel may be provided including a plurality of the cells arranged in an array on a substrate. | 11-17-2011 |
| 20110133597 | ELECTROMECHANICAL SYSTEMS, WAVEGUIDES AND METHODS OF PRODUCTION - A method of producing an electromechanical device includes forming a layer of density-changing material on a substructure, and forming a support layer on at least a portion of the layer of density-changing material. The density-changing material has a first density during the forming the layer and a second density subsequent to the forming the support layer, the second density being greater than the first density such that the layer of density-changing material shrinks in at least one dimension to provide a gap between the layer of density changing material and at least one of the support layer and the substructure. A combined electronic and electromechanical device has a substrate, an electronic circuit formed on the substrate, and an electromechanical system formed on the substrate to provide a combined electronic and electromechanical device on a common substrate. The electromechanical system comprises a structure that is free to move within a gap defined by the electromechanical system. | 06-09-2011 |
| 20090206953 | RESONANT MEMS DEVICE THAT DETECTS PHOTONS, PARTICLES AND SMALL FORCES - A resonant MEMS device that detects photons, particles and small forces including atomic forces is disclosed. The device comprises a planar substrate | 08-20-2009 |
