Saint-Gobain Ceramics and Plastics, Inc.
|Saint-Gobain Ceramics and Plastics, Inc. Patent applications|
|Patent application number||Title||Published|
|20090101625||Silicon carbide particles, methods of fabrication, and methods using same - Improved silicon carbide particles, improved silicon carbide abrasive particles, and abrasive slurry compositions for use chemical mechanical planarization (CMP) processes. The particles can comprise nano-sized silicon carbide particles, particularly silicon carbide particles having a surface chemistry similar to silica.||04-23-2009|