RUHR-UNIVERSITÄT BOCHUM Patent applications |
Patent application number | Title | Published |
20140103808 | METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS - A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component. | 04-17-2014 |
20130160523 | DEVICE AND USE OF THE DEVICE FOR MEASURING THE DENSITY AND/OR THE ELECTRON TEMPERATURE AND/OR THE COLLISION FREQUENCY OF A PLASMA - The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals. | 06-27-2013 |
20120097641 | METHOD AND DEVICE FOR PLASMA TREATMENT OF A FLAT SUBSTRATE - Method and device for the plasma treatment of a substrate in a plasma device, wherein—the substrate ( | 04-26-2012 |
20100182510 | SPECTRAL SMOOTHING METHOD FOR NOISY SIGNALS - A smoothing method for suppressing fluctuating artifacts in the reduction of interference noise includes the following steps: providing short-term spectra for a sequence of signal frames, transforming each short-term spectrum by way of a forward transformation which describes the short-term spectrum using transformation coefficients that represent the short-term spectrum subdivided into its coarse and fine structures; smoothing the transformation coefficients with the respective same coefficient indices by combining at least two successive transformed short-term spectra; and transforming the smoothed transformation coefficients into smoothed short-term spectra by way of a backward transformation. | 07-22-2010 |