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Raintree Scientific Instruments (Shanghai) Corporation

Raintree Scientific Instruments (Shanghai) Corporation Patent applications
Patent application numberTitlePublished
20120038920Method and Apparatus for Ellipsometry Measurement - Methods and systems are provided to avoid the rotation action with the polarizer and the analyzer in complex ellipsometric measurement and repeated processes. In particular, methods and systems are provided which polarize the incident light in a fixed azimuthal angle then illuminate the polarized light onto the target surface, analyze the surface polarized characteristics light in a fixed azimuthal angle, and obtain the light intensity and phase information corresponding to the target surface. Then, based on the relationship between the characteristic information detected by electromagnetic wave and the light intensity information, the disclosed methods and systems obtain the characteristic information of the target surface. 02-16-2012
20110176133METHOD AND APPARATUS FOR ELLIPSOMETRY MEASUREMENT - To avoid the rotation action with the polarizer and the analyzer in ellipsometric measurement, complex measurement and repeated process, this invention proposes to polarize the incident light in a fixed azimuthal angle then illuminate the polarized light onto the target surface, analyze the surface polarized characteristics light in a fixed azimuthal angle, and obtain the light intensity and phase information corresponding to the target surface, then based on the relationship between the characteristics information detected by electromagnetic wave and the light intensity information, to obtain the characteristics information of the target surface. In the measurement process, since there may be deviation in polarized azimuthal angle, incident angle and the analyzer azimuthal angle, this invention proposed to use references surfaces to calibrate, after this calibration, based on all the azimuthal angles, the light intensity corresponding to the target surface and the phase information, use the relationship between the characteristics information and the light intensity information, to obtain the characteristics information of the target surface.07-21-2011
20100118308Composite Optical Focusing Devices - The present invention is an optical system, comprising: a light source for providing light rays; a combined two or more parabolic reflectors or elliptical reflectors having inner reflecting surfaces, wherein the reflectors sharing a common focal point, and a device-under-test is disposed thereabout the focal point; wherein the collimated light rays coming into the parabolic reflector parallel to the axis of symmetry of each parabolic reflector would be directed to the focal point on the surface of the device-under-test. The reflected light rays from the device-under-test are directed by the other parabolic reflectors along the axes of symmetry of each parabolic reflector and generate information indicative of the device-under-test; wherein the reflected light rays exit the reflector; and a detector for receiving the exited light rays.05-13-2010

Patent applications by Raintree Scientific Instruments (Shanghai) Corporation