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QUALCOMM TECHNOLOGIES, INC.

QUALCOMM TECHNOLOGIES, INC. Patent applications
Patent application numberTitlePublished
20090040590MEMS DEVICE AND INTERCONNECTS FOR SAME - A microelectromechanical systems device having an electrical interconnect between circuitry outside the device and at least one of an electrode and a movable layer within the device. A layer of the electrical interconnect is formed directly under, over, or between a partially reflective layer and a transparent layer of the device. The layer of the electrical interconnect preferably comprises nickel.02-12-2009