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QUALCOMM MEMS Technologies, Inc.

QUALCOMM MEMS Technologies, Inc. Patent applications
Patent application numberTitlePublished
20130129922BATCH PROCESSING FOR ELECTROMECHANICAL SYSTEMS AND EQUIPMENT FOR SAME - This disclosure provides systems, methods and apparatus for processing multiple substrates in a batch cluster tool. A batch cluster tool can include a transfer chamber, an etch process chamber, and one or both of an ALD process chamber and an SAM process chamber. Multiple substrates are transferred from a transfer chamber into an etch chamber. The substrates are exposed to a vapor phase etchant. The substrates can then transferred to an atomic layer deposition (ALD) chamber and exposed to vapor phase reactants to form a thin film on the substrates by ALD. The substrates can be transferred either from the etch process chamber or the ALD chamber to a third chamber and exposed to vapor phase reactants to form a self-assembled monolayer (SAM) on the substrates.05-23-2013
20130127922STRUCTURES FOR DIRECTING INCIDENT LIGHT ONTO THE ACTIVE AREAS OF DISPLAY ELEMENTS - This disclosure provides systems, methods and apparatus for improving brightness, contrast, and viewable angle of a reflective display. In one aspect, a display includes a structure having a steering layer including steering features. The steering features are configured to direct light away from inactive regions of a display and towards active regions of the display. The structure may also include a diffuser for scattering light incident on the display and reflected by the display.05-23-2013
20130127881SYSTEMS, DEVICES, AND METHODS FOR DRIVING A DISPLAY - This disclosure provides systems, methods and apparatus for writing data to a display. The frame rate is improved by simultaneously and independently writing data to multiple common lines of the display. In some implementations, lines of common color are written simultaneously. In some implementations, more common lines of lower visual importance are written simultaneously than common lines of higher visual importance. In these implementations, colors of higher visual importance can be displayed at a higher resolution to maintain good image quality while still improving frame rate. Display element electrodes may be coupled along common lines in various ways to implement simultaneous writing to multiple common lines.05-23-2013
20130127880DISPLAY DEVICE AND DUAL-SIDED PROCESS FOR FORMING LIGHT TURNING FEATURES AND DISPLAY ELEMENTS - This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light. In an aspect, an illumination system is provided with a substrate having a first side and a second side opposite the first. The substrate can be optically transmissive and form part of the light guide for distributing light. The first side of the substrate is processed using a first processing technology. Processing the first side includes forming a light turning feature on the first side and forming a protective layer over the light turning feature. The second side is processed using a second processing technology to form display elements, while the protective layer protects the first side from damage. The first and second processing technologies can be performed using the same tool set. In addition to protecting the first side, the protective layer may function as an optical cladding and/or passivation layer.05-23-2013
20130127879GLASS-ENCAPSULATED PRESSURE SENSOR - This disclosure provides systems, methods and apparatus for glass-encapsulated pressure sensors. In one aspect, a glass-encapsulated pressure sensor may include a glass substrate, an electromechanical pressure sensor, an integrated circuit device, and a cover glass. The cover glass may be bonded to the glass substrate with an adhesive, such as epoxy, glass frit, or a metal bond ring. The cover glass may have any of a number of configurations. In some configurations, the cover glass may partially define a port for the electromechanical pressure sensor at an edge of the glass-encapsulated pressure sensor. In some configurations, the cover glass may form a cavity to accommodate the integrated circuit device that is separate from a cavity that accommodates the electromechanical pressure sensor.05-23-2013
20130127794WRITE WAVEFORM PORCH OVERLAPPING - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for writing data to a display having an array of display elements. Delays which are utilized in reducing error during writing data to the array of display elements may be overlapped in time with each other to improve the frame rate of the display.05-23-2013
20130127784METHODS AND APPARATUSES FOR HIDING OPTICAL CONTRAST FEATURES - This disclosure provides systems, methods, and apparatuses for hiding optical contrast features. To reduce visibility of an elongated optical contrast feature, such as a wire on a transparent light guide, neighboring light-turning features in the light guide are “moved” relative to their location in a layout where they are physically uniformly distributed. This movement renders the local optical density in the region around the wire more equal to the optical density in other regions of the light guide. The movement of neighboring light-turning features occurs principally within a distance from the wire that is within the width of the line spread function of the human eye at a normal viewing distance. The uniformity of the local optical density is therefore increased, and the human eye does not perceive the wires as being separate structures. Thus, the wires can be “hidden” within a field of light-turning features.05-23-2013
20130127744WIREFRAME TOUCH SENSOR DESIGN AND SPATIALLY LINEARIZED TOUCH SENSOR DESIGN - A touch sensor may include thin, conductive wires as at least some of the sensor electrodes. Some or all of the conductive wires may be metal wires. The sensor electrodes may not be noticeable to a human observer. In some such implementations, the sensor electrodes may be laid out in a pattern and/or grouped to create a spatial gradient. Some such implementations involve spatial interweaving, spatial interposing and/or length modulation of sensor electrodes. Such implementations can create a spatial gradient such that fewer rows and columns are required to provide a touch sensor panel with a given level of accuracy.05-23-2013
20130127736ELECTROMAGNETIC TOUCHSCREEN - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for determining a presence and/or a location of an object interacting with a touchscreen display having a user interface surface. The device also includes a source of a radio frequency (RF) electromagnetic signal, a plurality of detectors, a processor, and a grid including a number of electrically conductive transmission lines. Each transmission line is electrically coupled, at a first end, to the signal source, and, at a second end, to a respective one of the plurality of detectors. The grid is disposed near to and behind the user interface surface. The detectors are configured to detect an output signal of a respective transmission line. The processor collects, from each detector, a respective detector output, and determines, from the detector outputs, a presence and/or a location of an object near to the user interface surface.05-23-2013
20130127694AMORPHOUS OXIDE SEMICONDUCTOR THIN FILM TRANSISTOR FABRICATION METHOD - This disclosure provides systems, methods and apparatus for fabricating thin film transistor (TFT) devices. In one aspect, a substrate having a source area, a drain area, and a channel area is provided. Metal cations are implanted in the oxide semiconductor layer overlying the source area and the drain area of the substrate. The metal cation implantation forms a doped n-type oxide semiconductor in the oxide semiconductor layer overlying the source area and the drain area of the substrate.05-23-2013
20130125969PHOTOVOLTAIC DEVICES AND METHODS OF FORMING THE SAME - This disclosure provides photovoltaic apparatus and methods of forming the same. In one implementation, a method of forming a photovoltaic device includes forming a plurality of substrate features on a surface of a glass substrate, the substrate features having a depth dimension in the range of about 10 μm to about 1000 μm and a width dimension in the range of about 10 μm to about 1000 μm. The method further includes forming a thin film solar cell over the surface of the glass substrate including over the plurality of substrate features.05-23-2013
20130124116SYSTEMS AND METHODS FOR PREDICTING THE LIFETIME OF AN ELECTROMECHANICAL DEVICE - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for estimating the lifetime or remaining lifetime of an electromechanical systems (EMS) device. In one aspect, a parameter of the device, such as a release or actuation voltage, is measured. The parameter measurement is used in conjunction with a model of the aging of the device according to the measured parameter to determine an estimated remaining lifetime of the device.05-16-2013
20130120476SYSTEMS, DEVICES, AND METHODS FOR DRIVING A PLURALITY OF DISPLAY SECTIONS - An apparatus for displaying data includes a first array of display elements having a plurality of rows and columns, a second array display of display elements having a plurality of rows and columns, and a third array of display elements having a plurality of rows and columns. In some implementations, the third array is disposed between the first and second arrays. The apparatus further includes a first set of busses connected to supply display signals to columns of the first array, a second set of busses connected to supply display signals to columns of the second array, and a third set of busses connected to supply display signals to columns of the third array.05-16-2013
20130120470SHIFTED QUAD PIXEL AND OTHER PIXEL MOSAICS FOR DISPLAYS - This disclosure provides systems and apparatuses having pixels connected to various drive lines. In one implementation, a passive matrix display apparatus comprises a plurality of display elements, arranged in rows and columns, each common line driving display elements of a single color, wherein at least one common line of the plurality of common lines is coupled to display elements in two or more rows to drive the two or more rows, and a plurality of sets of multiple segment lines, each set of multiple segment lines associated with a column of display elements, wherein one segment line of the set of multiple segment lines addresses display elements of a given color of one row along the column and an other segment line in the set of multiple segment lines addresses display elements of the given color of another row along the column.05-16-2013
20130120465SYSTEMS AND METHODS FOR DRIVING MULTIPLE LINES OF DISPLAY ELEMENTS SIMULTANEOUSLY - This disclosure provides systems, methods, and apparatus, including computer programs encoded on computer storage media, for driving a pixel of a display. In one aspect, a segment driver and a common driver may be used to substantially concurrently address all display elements in the pixel. This addressing may reduce write time of the pixel, and may reduce the power consumed during the write process.05-16-2013
20130120416STORAGE CAPACITOR FOR ELECTROMECHANICAL SYSTEMS AND METHODS OF FORMING THE SAME - This disclosure provides systems, methods and apparatus for storage capacitors. In one aspect, an electromechanical systems (EMS) device includes a substrate, an optical stack disposed over the substrate, a mechanical layer positioned over the optical stack, and a storage capacitor. The optical stack includes a stationary electrode and at least one dielectric layer disposed over the stationary electrode, and the storage capacitor includes a first plate, a second plate and a dielectric structure disposed between the first and second plates. The first plate includes a portion of the mechanical layer positioned over an optically non-active region of the device, and the dielectric structure of the storage capacitor includes a portion of the at least one dielectric layer of the optical stack.05-16-2013
20130120415COMBINED RESONATORS AND PASSIVE CIRCUIT COMPONENTS ON A SHARED SUBSTRATE - This disclosure provides implementations of electromechanical systems combined resonator and passive circuit component structures, devices, apparatus, systems, and related processes. In one aspect, the device includes a piezoelectric resonator structure formed over an insulating substrate. A portion of the piezoelectric resonator structure is spaced apart from the substrate by a first gap. A passive circuit component structure such as an inductor or a capacitor is formed over the insulating substrate. A portion of the passive circuit component structure is spaced apart from the substrate by a second gap. The first gap and the second gap are defined by removal of a sacrificial (SAC) layer.05-16-2013
20130120414PATTERNING OF ANTISTICTION FILMS FOR ELECTROMECHANICAL SYSTEMS DEVICES - A laser absorption layer is first selectively formed in a seal pattern region surrounding an array of electromechanical systems elements, followed by depositing an antistiction layer as a blanket layer over the substrate and the laser absorption layer. The antistiction layer is then selectively removed from the seal pattern using a laser. An epoxy sealing material is provided in the seal pattern where the antistiction layer was removed and a backplate is sealed to the substrate using epoxy.05-16-2013
20130120327STORAGE CAPACITOR FOR ELECTROMECHANICAL SYSTEMS AND METHODS OF FORMING THE SAME - This disclosure provides systems, methods and apparatus for storage capacitors. In one aspect, a device includes an array having at least a first display element and a second display element, at least one switch configured to control a flow of charge between a source and the first display element, and at least one interferometric optical mask structure disposed in a non-active area of the array between the first display element and the second display element. The optical mask structure includes a storage capacitor formed by a first conductive layer and a second conductive layer. The storage capacitor is electrically coupled to the at least one switch and the first display element.05-16-2013
20130120226SHIFTED QUAD PIXEL AND OTHER PIXEL MOSAICS FOR DISPLAYS - This disclosure provides systems and apparatuses having pixels with various display element arrangements. In one aspect, a passive matrix display apparatus includes a plurality of red display elements extending along a direction parallel to a first row, the plurality of red display elements addressed by a single first common line, a plurality of green display elements extending along a direction parallel to a second row, the plurality of green display elements addressed by a single second common line, and a plurality of blue display elements extending along a direction parallel to a third row, the plurality of blue display elements addressed by a single third common line, where the number of green display elements in the display is greater than one of a number of red display elements in the display and a number of blue display elements in the display.05-16-2013
20130120081COMBINED RESONATORS AND PASSIVE CIRCUIT COMPONENTS FOR FILTER PASSBAND FLATTENING - This disclosure provides implementations of electromechanical systems combined resonator and passive circuit components. In one aspect, passband flattened filter apparatus includes a resonator structure and input and output passband flattening components. The resonator structure has a first input, a second input coupled to a ground terminal, a first output, and a second output coupled to the ground terminal. The input passband flattening component includes a first inductor having an output coupled to the first input of the resonator structure, and a second inductor having an input coupled to the first input of the resonator structure and an output coupled to the ground terminal. The output passband flattening component includes a first inductor having an input coupled to the first output of the resonator structure, and a second inductor having an input coupled to the first output of the resonator structure and an output coupled to the ground terminal.05-16-2013
20130118548APPARATUS AND METHODS FOR ENHANCING PHOTOVOLTAIC EFFICIENCY - This disclosure provides photovoltaic modules and methods of making the same. In one implementation, a photovoltaic module includes a plurality of photovoltaic devices configured to absorb light and generate electrical power and a plurality of conductors disposed over the photovoltaic devices. The photovoltaic module further includes a glass layer disposed over the photovoltaic devices, and the glass layer includes a textured surface opposite the plurality of photovoltaic devices. The textured surface includes features configured to diffract light incident the photovoltaic module. The photovoltaic module further includes a diffusive layer disposed over at least a portion of the plurality of conductors.05-16-2013
20130114294FRONT LIGHT DEVICES AND METHODS OF FABRICATION THEREOF - A illumination device comprises a light guide having a first end for receiving light and configured to support propagation of light along the length of the light guide. A turning microstructure is disposed on a first side of the light guide configured to turn light incident on the first side and to direct the light out a second opposite side of the light guide, wherein the turning microstructure comprises a plurality of indentations. A cover is physically coupled to the light guide and disposed over the turning microstructure. An interlayer is between the cover and the light guide, wherein the interlayer physically couples the cover to the light guide. A plurality of open regions is between the interlayer and the plurality of indentations. Various embodiments include methods of coupling the cover to the light guide while preserving open regions between the cover and plurality of indentations.05-09-2013
20130114121MATCHING LAYER THIN-FILMS FOR AN ELECTROMECHANICAL SYSTEMS REFLECTIVE DISPLAY DEVICE - This disclosure provides systems, methods and apparatus for an electromechanical systems reflective display device. In one aspect, an electromechanical systems display device includes a reflective layer and an absorber layer. The absorber layer is spaced apart from the reflective layer to define a cavity between the absorber layer and the reflective layer. The absorber layer is capable of transmitting light into the cavity, absorbing light, and reflecting light, and includes a metal layer. A plurality of matching layers are on a surface of the absorber layer facing away from the cavity, the plurality of matching layers including a first matching layer disposed on the absorber layer and a second matching layer disposed on the first matching layer.05-09-2013
20130113810SIDEWALL SPACERS ALONG CONDUCTIVE LINES - Systems, methods and apparatus are provided for electromechanical systems devices having a sidewall spacer along at least one sidewall of a conductive line. An electromechanical systems device can include a sidewall spacer along at least one sidewall of a conductive line under a movable layer. The sidewall spacer can be sloped such that the sidewall spacer has a decreasing width away from a substrate under the movable layer. The conductive line can be configured to route an electrical signal to the electromechanical systems device. In some implementations, a black mask structure of an electromechanical systems device can include the conductive line.05-09-2013
20130113771DISPLAY DRIVE WAVEFORM FOR WRITING IDENTICAL DATA - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for alternating the polarity of a voltage across a display element. In one aspect, a display element is maintained in a current state following an alternation of polarity. A driving signal waveform is transitioned from a hold voltage of a first polarity substantially directly to a write voltage of a second polarity, and transitioned substantially directly from the write voltage of the second polarity to a hold voltage of the second polarity.05-09-2013
20130113713IMOD ART WORK FOR DISPLAYS - Static IMOD structures may be formed in a border area of a substrate. In some implementations, conductive layers such as an absorber or a reflector of a static IMOD may be used to make electrical connections from the electrodes of a touch sensor to the flex cable or controller of the touch sensor. In some implementations, static IMODs may be configured to provide a border with a single, uniform color, whereas in other implementations static IMODs may be configured to provide artwork for the substrate. A variety of images and/or patterns of colors may be formed using the static IMODs. Some such static IMODs may be configured as numerous individual pixels or subpixels, such as red, blue and green subpixels.05-09-2013
20130100675MULTI-FUNCTIONAL GLASS WINDOW WITH PHOTOVOLTAIC AND LIGHTING FOR BUILDING OR AUTOMOBILE - The present disclosure describes multi-functional windows. Functions of the multi-functional windows described herein can include transmitting incident light, generating photovoltaic power from incident light, and emitting light. In some implementations, a multi-functional window may be placed in a photovoltaic state, a lighting state, or a neutral state. A multi-functional window can continue to function as a normal window in transmitting a portion of any incident light in any of the photovoltaic, lighting, and neutral states. A multi-functional window can be implemented in a building or automobile.04-25-2013
20130100518TUNING MOVABLE LAYER STIFFNESS WITH FEATURES IN THE MOVABLE LAYER - This disclosure provides systems, methods and apparatus for an electromechanical systems device. In one aspect, an electromechanical systems device may include a substrate and a movable layer positioned apart from the substrate. The movable layer and the substrate may define a cavity. The movable layer may be movable to increase the size of the cavity or to decrease the size of the cavity. The movable layer also may include a first anchor point attaching the movable layer to the substrate and a first feature associated with the first anchor point. The first feature may include a protrusion of the movable layer into or out from the cavity.04-25-2013
20130100176SYSTEMS AND METHODS FOR OPTIMIZING FRAME RATE AND RESOLUTION FOR DISPLAYS - This disclosure describes systems, methods, and apparatus for increasing the frame rate of a display, while maintaining or improving image resolution. In one aspect, displays may include a plurality of pixels arranged along segment lines and common lines, and the common lines may be associated with one or more colors. In one implementation, one set of common lines is written independently of the other common lines, and at least one other set of common lines is written simultaneously. The resolution is preserved by the independent writing of one set of common lines, while the frame rate is increased by the line multiplication of another set of common lines.04-25-2013
20130100145ELECTROMECHANICAL SYSTEMS DEVICE - This disclosure provides systems, methods, and apparatus for EMS devices. In one aspect, an EMS device includes at least one movable layer configured to move relative to one or more electrodes. The at least one movable layer can include a first conductive layer, a second conductive layer, and a non-conductive layer disposed between the first conductive layer and the second conductive layer. In some implementations, the movable layer can include at least one conductive via electrically connecting the first conductive layer and the second conductive layer through the non-conductive layer.04-25-2013
20130100144ILLUMINATION DEVICE AND PROCESS FOR FORMING COATED RECESSED LIGHT GUIDE FEATURES - This disclosure provides systems, methods and apparatus for providing illumination by using light turning features in a light guide. In an aspect, an illumination system is provided with a light guide configured to support propagation of light along the length of the light guide. The light guide includes a light turning feature formed by an indentation in the light guide. A coating layer is disposed along surfaces of the indentation and the volume of the indentation over the coating is filled with a filler. The filler substantially fills the indentation to an upper surface of the light turning feature and is spaced apart from the light guide. The light guide is configured to provide total internal reflection of light at the upper surface of the light guide. Light from a light source can be injected into the light guide and then redirected by the turning features to illuminate a display.04-25-2013
20130100143STACKED VIAS FOR VERTICAL INTEGRATION - This disclosure provides systems, methods and apparatus for a via structure. In one aspect, an apparatus includes a substrate and a first electromechanical systems device on a surface of the substrate. The first electromechanical systems device includes a first metal layer and a second metal layer. A first via structure can be included on the surface of the substrate. The first via structure includes the first metal layer, the second metal layer, and a third metal layer. The first metal layer of the first electromechanical systems device may be the same metal layer as the first metal layer of the first via structure.04-25-2013
20130100109METHOD AND DEVICE FOR REDUCING EFFECT OF POLARITY INVERSION IN DRIVING DISPLAY - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for reducing artifacts in an image generated by a display device. In one aspect, data is written to a display and a position of display elements is maintained based on the application of a hold voltage pattern. The hold voltage pattern includes alternating polarities along one dimension in a pattern, and alternating polarities along a second dimension in a pattern. The polarities of the first and second patterns may be switched in a manner that maintains a substantially constant magnitude voltage across each display element.04-25-2013
20130100107METHOD AND APPARATUS FOR MODEL BASED ERROR DIFFUSION TO REDUCE IMAGE ARTIFACTS ON AN ELECTRIC DISPLAY - This disclosure provides methods and apparatus, including computer programs encoded on computer storage media, for reducing visual aberrations on an electronic display. One aspect is a method of writing an input image data value to a display element in a electronic display. The method includes receiving an input image data value, and quantizing the image data value based on a threshold. The threshold may be modulated based on a voltage drive signal provided to the display element in the electronic display. The method may also write the quantized image data value to the display element.04-25-2013
20130100100METHOD AND DEVICE FOR REDUCING EFFECT OF POLARITY INVERSION IN DRIVING DISPLAY - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for reducing artifacts in an image generated by a display device. In one aspect, data is written to a display and a position of display elements is maintained based on the application of a bias voltage pattern. The bias voltage pattern includes alternating polarities along one dimension in a pattern having a first frequency spectrum, and alternating polarities along a second dimension in a pattern having a second frequency spectrum that is different than the first frequency spectrum. At least one of the first and second frequency spectrums may include a plurality of frequency components.04-25-2013
20130100099ADAPTIVE LINE TIME TO INCREASE FRAME RATE - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for determining a line time for writing data to display elements on one or more common lines of an array of display elements. In one aspect, the line time is determined for writing data to a line of display elements based on the received image data to be written to the line of display elements.04-25-2013
20130100097DEVICE AND METHOD OF CONTROLLING LIGHTING OF A DISPLAY BASED ON AMBIENT LIGHTING CONDITIONS - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for controlling lighting of a display based on ambient light conditions. In one aspect, a display device can include a display and an auxiliary light source configured to provide supplemental light to the display. The display device further can include a sensor system configured to measure a diffuse illuminance of ambient light from a wide range of directions and configured to measure a directed illuminance of the ambient light from a relatively narrow range of directions. The display device further can include a controller configured to adjust the auxiliary light source to provide an amount of supplemental light to the display. The amount of supplemental light can be based at least in part on the measured directed illuminance and the measured diffuse illuminance of the ambient light.04-25-2013
20130100096DEVICE AND METHOD OF CONTROLLING BRIGHTNESS OF A DISPLAY BASED ON AMBIENT LIGHTING CONDITIONS - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for controlling brightness of a display based on ambient light conditions. In one aspect, a display device can include a reflective display and an auxiliary light source configured to provide supplemental light to the display. The display device further can include a sensor system configured to determine an illuminance of ambient light, and a controller configured to adjust the auxiliary light source to provide an amount of supplemental light to the display based at least in part on the determined illuminance. In one aspect, the amount of supplemental light remains substantially the same or substantially increases in response to increasing illuminance when the illuminance is below a first threshold, and substantially decreases in response to increasing illuminance when the illuminance is above a second threshold that is greater than or equal to the first threshold.04-25-2013
20130100090ELECTROMECHANICAL SYSTEMS VARIABLE CAPACITANCE DEVICE - This disclosure provides systems, methods and apparatus for electromechanical systems variable capacitance devices. In one aspect, an electromechanical systems variable capacitance device includes a substrate with a first metal layer including a first bias electrode overlying the substrate. A member suspended above the first metal layer includes a dielectric beam and a second metal layer including a first radio frequency electrode and a ground electrode. The member and the first metal layer define a first air gap. A third metal layer over the member includes a second bias electrode, and the third metal layer and the member define a second air gap. The member includes a plane of symmetry substantially parallel a plane containing the first bias electrode.04-25-2013
20130100065ELECTROMECHANICAL SYSTEMS VARIABLE CAPACITANCE DEVICE - This disclosure provides systems, methods and apparatus for electromechanical systems variable capacitance devices. In one aspect, an electromechanical systems variable capacitance device includes a substrate with a bottom bias electrode on the substrate. A first radio frequency electrode above the bottom bias electrode defines a first air gap. A non-planarized first dielectric layer is between the bottom bias electrode and the first radio frequency electrode. A metal layer above the first radio frequency electrode defines a second air gap. The metal layer includes a top bias electrode and a second radio frequency electrode.04-25-2013
20130100012DISPLAY WITH DYNAMICALLY ADJUSTABLE DISPLAY MODE - A display mode, including an update rate and/or resolution of an electronic display device, is dynamically adjusted by computing a change rate metric (CRM) representative of an image change rate, and adjusting, based on the CRM, at least one of the update rate and the image resolution. The display device may be switched between at least two display modes, based on the CRM, which may be computed by comparing each pixel row in a first frame with a corresponding pixel row in a comparison frame, and determining a number of pixel rows that have changed. A cyclic redundancy check (CRC) value for each pixel row may be computed, and the CRM may then be computed by determining a number of pixel rows that have a changed CRC value with respect to a corresponding pixel row of the comparison frame.04-25-2013
20130100003METHOD AND DEVICE FOR MANIPULATING COLOR IN A DISPLAY - A method and device for manipulating color in a display is disclosed. In one embodiment, a display comprises interferometric display elements formed to have spectral responses that produce white light. In one embodiment, the produced white light is characterized by a standardized white point.04-25-2013
20130098675METHOD AND APPARATUS FOR APPLICATION OF ANTI-STICTION COATING - This disclosure provides apparatus, systems and methods for manufacturing electromechanical systems (EMS) packages. One method includes making an EMS package that includes an out-gassable anti-stiction coating. The anti-stiction coating may be a solvent that is included within part of a desiccant mixture. In some implementations, the method includes sealing an EMS device into a package and then heating the package using a temperature profile that out-gasses at least a portion of a residual solvent. The method may include an incubation bake cycle to distribute anti stiction material to display elements within the EMS package. The incubation bake cycle may also more evenly distribute contaminants within the EMS package so as to reduce their effects.04-25-2013
20130093744METHODS AND SYSTEMS FOR ENERGY RECOVERY IN A DISPLAY - Systems, methods and apparatus, including computer programs encoded on computer storage media, are used for driving a display. In one aspect, the method includes connecting a first segment line to a first voltage, connecting a second segment line to a second voltage, and connecting the least a first segment line to the second segment line through at least one inductor. The polarities of segment line voltages may therefore be switched by reusing energy in the system.04-18-2013
20130088498ELECTROMECHANICAL SYSTEMS DEVICE WITH NON-UNIFORM GAP UNDER MOVABLE ELEMENT - Systems, methods and apparatus are provided for electromechanical systems devices having a non-uniform gap under a mechanical layer. An electromechanical systems device includes a movable element supported at its edges over a substrate by at least two support structures. The movable element can be spaced from the substrate by a gap having two or more different heights in two or more corresponding distinct regions. The gap has a first height in a first region below the gap, such as an active area of the device, and a second height in a second region adjacent the support structure. In an interferometric modulator implementation, the second region can be encompasses within an anchor region with a black mask.04-11-2013
20130087190PHOTOVOLTAIC DEVICES AND METHODS OF FORMING THE SAME - This disclosure provides photovoltaic apparatus and methods of forming the same. In one implementation, a photovoltaic device includes an anode contact structure, a cathode contact structure, and an inorganic solar cell disposed between the anode and cathode contact structures. The inorganic solar cell includes a p-type photovoltaic layer, an n-type photovoltaic layer, and one or more minority carrier blocking layers for improving the efficiency of the solar cell by preventing minority carriers within the solar cell from reaching interface recombination surfaces associated with the anode and cathode contact structures.04-11-2013
20130083044CROSS-SECTIONAL DILATION MODE RESONATORS - Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.04-04-2013
20130083038METHODS OF CREATING SPACERS BY SELF-ASSEMBLY - This disclosure provides systems, methods and apparatus for fabricating spacers for electromechanical systems devices. In one aspect, a method of forming a spacer on a spacer portion of a device surface of an electromechanical systems device includes exposing the device surface to spacer particles suspended in a fluid. The spacer particles are allowed to attach to the spacer portion. Each of the spacer particles can have at least one dimension of about 1 micron to 10 microns. The electromechanical systems device can also include a sacrificial layer that is subsequently removed between the device surface and a substrate surface of a substrate on which the electromechanical systems device is formed.04-04-2013
20130082799CROSS-SECTIONAL DILATION MODE RESONATORS AND RESONATOR-BASED LADDER FILTERS - Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.04-04-2013
20130069974HYBRID VIDEO HALFTONING TECHNIQUES - This disclosure provides techniques related to halftoning video images for display on an electronic device. The techniques include adaptively selecting, on a pixel-by-pixel basis, between a mask-based dithering (MBD) and an error diffusion (ED) halftoning technique. The ED technique may be selected for halftoning pixels of an input frame of data having either a temporal change rate metric (CRM) or a spatial CRM exceeding a respective threshold. Where both the temporal CRM and spatial CRM are less than the respective thresholds, halftoning may be performed by the technique that produces a halftone value closer to a comparison halftone value of a comparison frame. The comparison frame may be a preceding frame, or an immediately preceding frame.03-21-2013
20130069968METHODS AND APPARATUS FOR HYBRID HALFTONING OF AN IMAGE - This disclosure provides methods, apparatus, and computer programs encoded on computer storage media for tone based halftoning of digital images. By exploiting knowledge of local image features and tone levels, the halftoning method may be adaptively switched between error-diffusion and mask-based dithering with reduced boundary artifacts. By further utilizing a smart quantization error clipping scheme, artifacts inherent to the method of error diffusion are also reduced. The method consistently generates higher quality halftone images for both still and video applications when compared to conventional methods.03-21-2013
20130069958ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION - A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.03-21-2013
20130063415BACKPLATE INTERCONNECT WITH INTEGRATED PASSIVES - This disclosure provides systems, methods and apparatus for manufacturing display devices having electronic components mounted within a display device package. In one aspect, the electronic component connects to the exterior of the display device through pads that run below a seal that holds a substrate and a backplate of the display device together. In another aspect the electronic components also connect to an electromechanical device within the display device, as well as connecting to pads that are external to the display device.03-14-2013
20130063335METHOD AND SYSTEM FOR WRITING DATA TO MEMS DISPLAY ELEMENTS - Charge balanced display data writing methods use write and hold cycles of opposite polarity during selected frame update periods. The transitions between voltages of opposite polarity are sufficiently brief that the display elements do not change state. A release cycle may be provided to reduce the chance that a given display element will become stuck in an actuated state.03-14-2013
20130057558MECHANICAL LAYER AND METHODS OF MAKING THE SAME - This disclosure provides systems, methods and apparatus for controlling a mechanical layer. In one aspect, an electromechanical systems device includes a substrate and a mechanical layer positioned over the substrate to define a gap. The mechanical layer is movable in the gap between an actuated position and a relaxed position, and includes a mirror layer, a cap layer, and a dielectric layer disposed between the mirror layer and the cap layer. The mechanical layer is configured to have a curvature in a direction away from the substrate when the mechanical layer is in the relaxed position. In some implementations, the mechanical layer can be formed to have a positive stress gradient directed toward the substrate that can direct the curvature of the mechanical layer upward when the sacrificial layer is removed.03-07-2013
20130057557HIGH AREA STACKED LAYERED METALLIC STRUCTURES AND RELATED METHODS - This disclosure provides implementations of high surface area stacked layered metallic structures, devices, apparatus, systems, and related methods. A plurality of stacked layers on a substrate may be manufactured from a plating bath including a first metal and a second metal. A modulated plating current can deposit alternate first metal layers and alloy layers, the alloy layers including the first metal and the second metal. Gaps between the alloy layers can be formed by selectively etching some portions of the first metal layers to define a stacked layered structure. Stacked layered structures may be useful in applications to form capacitors, inductors, catalytic reactors, heat transfer tubes, non-linear springs, filters, batteries, and heavy metal purifiers.03-07-2013
20130051587PIEZOELECTRIC MICROPHONE FABRICATED ON GLASS - This disclosure provides systems, methods and apparatus for sense elements in an electromechanical microphone device. In one aspect, a piezoelectric sense element may include a glass substrate, electrode layers, piezoelectric layers, and elastic layers. The elastic layers may serve to modify the neutral plane of the piezoelectric sense element. Including an elastic layer or layers to modify the neutral plane of the piezoelectric sense element may serve to configure the sense element such that the piezoelectric layer generates a voltage in response to a sound wave or may serve to increase the sensitivity of the sense element.02-28-2013
20130050155GLASS AS A SUBSTRATE MATERIAL AND A FINAL PACKAGE FOR MEMS AND IC DEVICES - This disclosure provides systems, methods and apparatus for glass packaging of integrated circuit (IC) and electromechanical systems (EMS) devices. In one aspect, a glass package may include a glass substrate, a cover glass, one or more devices encapsulated between the glass substrate and the cover glass, and bond pads configured to attach to a flexible connector and in electrical communication with an encapsulated device. In some implementations, a flexible connector may be used to electrically connect a device within the glass package to an electrical component, such as an integrated circuit (IC) device or PCB, outside the glass package.02-28-2013
20130049844CAPACITIVE TOUCH SENSOR HAVING LIGHT SHIELDING STRUCTURES - This disclosure provides systems, methods, and apparatus related to a capacitive touch sensor with light shielding structures. In one aspect, a device includes an array formed by a plurality of row electrodes and a plurality of non-transparent column electrodes, wherein at least a first portion of the row electrodes is non-transparent and coplanar with the column electrodes and at least a second portion of the row electrodes is non-coplanar with the column electrodes. The device further includes light shielding structures that are non-transparent and coplanar with the column electrodes, wherein the light shielding structures substantially overlap the second portion.02-28-2013
20130038565TOUCH SENSING INTEGRATED WITH DISPLAY DATA UPDATES - This disclosure provides systems, methods and apparatus for touch sensing on a display device. In one aspect, a method is provided for reducing electrical interference on a display including bi-stable display elements and touch sensing elements without a grounded shielding layer between display elements and touch sensing elements. The method may include placing at least a portion of an array of bi-stable display elements in a selected state with display driver circuitry, maintaining the display elements in the selected state, and obtaining a signal from a touch-sensing element using touch sensing driver circuitry different from the display driver circuitry when the display elements remain in the selected state.02-14-2013
20130037793AMORPHOUS OXIDE SEMICONDUCTOR THIN FILM TRANSISTOR FABRICATION METHOD - This disclosure provides systems, methods and apparatus for fabricating thin film transistor devices. In one aspect, a substrate having a source area, a drain area, and a channel area is provided. The substrate also includes an oxide semiconductor layer, a first dielectric layer overlying the channel area of the substrate, and a first metal layer on the dielectric layer. Hydrogen ions are implanted with a plasma-immersion ion implantation process in the oxide semiconductor layer overlying the source area and the drain area of the substrate. The hydrogen ion implantation forms a doped n-type oxide semiconductor in the oxide semiconductor layer overlying the source area and the drain area of the substrate.02-14-2013
20130032385METAL THIN SHIELD ON ELECTRICAL DEVICE - This disclosure provides systems and methods for forming a metal thin film shield over a thin film cap to protect electromechanical systems devices in a cavity beneath. In one aspect, a dual or multi layer thin film structure is used to seal a electromechanical device. For example, a metal thin film shield can be mated over an oxide thin film cap to encapsulate the electromechanical device and prevent degradation due to wafer thinning, dicing and package assembly induced stresses, thereby strengthening the survivability of the electromechanical device in the encapsulated cavity. During redistribution layer processing, a metal thin film shield, such as a copper layer, is formed over the wafer surface, patterned and metalized.02-07-2013
20130027444FIELD-SEQUENTIAL COLOR ARCHITECTURE OF REFLECTIVE MODE MODULATOR - A field-sequential color architecture is included in a reflective mode display. The reflective mode display may be a direct-view display such as an interferometric modulator display. In some implementations, the reflective mode display may include three or more different subpixel types, each of which corresponds to a color. In some such implementations, the colors include primary colors. Data for each color may be written sequentially to subpixels for that color, while subpixels of the remaining colors are written to black. Alternatively, data for each color may be written sequentially to all subpixels of the display. Flashing of a corresponding colored light, e.g., from a front light of the display, may be timed to immediately follow a process of writing data for that color.01-31-2013
20130027440ENHANCED GRAYSCALE METHOD FOR FIELD-SEQUENTIAL COLOR ARCHITECTURE OF REFLECTIVE DISPLAYS - A field-sequential color architecture is included in a reflective mode display. The reflective mode display may be a direct-view display such as an interferometric modulator display. The reflective mode display may include three or more different subpixel types, each of which corresponds to a color. Data for each color may be written sequentially to all subpixels of the display. Flashing of a corresponding colored light, e.g., from a front light of the display, may be timed to immediately follow a process of writing data for that color. Colors other than the field color may be used to produce grayscale. The field color may correspond to the most significant bit (MSB) and the other colors may correspond to other bits.01-31-2013
20130026136SPUTTER-ETCH TOOL AND LINERS - This disclosure provides systems, methods and apparatus for fabricating electromechanical system devices within a plasma-etch reaction chamber. In one aspect, a plasma-etch system includes a plasma-etch reaction chamber, an inlet in fluid communication with the reaction chamber, a cathode positioned within the reaction chamber and a non-hollow anode positioned within the reaction chamber between the inlet and the cathode. The inlet is configured to introduce a process gas into the reaction chamber such that at least a portion of the process gas strikes an upper surface of the anode and is allowed to flow across the upper surface and around the edges of the anode. The anode can be a liner plate in place of a showerhead.01-31-2013
20130021313METHODS AND DEVICES FOR VOLTAGE REDUCTION FOR ACTIVE MATRIX DISPLAYS USING VARIABILITY OF PIXEL DEVICE CAPACITANCE - Methods and devices for reducing the voltage required to update an array of display elements having variable capacitance are described herein. In one implementation, the method includes driving a display element to a first state using a reset drive line. The method further includes driving the display element to a second state using a column drive line. The capacitance of the display element is higher in the first state than in the second state01-24-2013
20130021309METHODS AND DEVICES FOR DRIVING A DISPLAY USING BOTH AN ACTIVE MATRIX ADDRESSING SCHEME AND A PASSIVE MATRIX ADDRESSING SCHEME - Methods and devices for updating an array of display elements using both an active matrix addressing scheme and a passive matrix addressing scheme are described herein. In one embodiment, the method comprises selecting between an active matrix addressing scheme and a passive matrix addressing scheme. The method further comprises driving the array of display elements using the selected addressing scheme.01-24-2013
20130021305PIEZOELECTRIC LATERALLY VIBRATING RESONATOR STRUCTURE GEOMETRIES FOR SPURIOUS FREQUENCY SUPPRESSION - This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a resonator structure includes a first conductive layer of electrodes and a second conductive layer of electrodes. A piezoelectric layer including a piezoelectric material is disposed between the first conductive layer and the second conductive layer. One or more trenches can be formed in the piezoelectric layer on one or both sides in space regions between the electrodes. In some implementations, a process for forming the resonator structure includes removing an exposed portion of the piezoelectric layer to define a trench, for instance, by partial etching or performing an isotropic release etch using a XeF01-24-2013
20130021304PIEZOELECTRIC LATERALLY VIBRATING RESONATOR STRUCTURES WITH ACOUSTICALLY COUPLED SUB-RESONATORS - This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. A resonator structure generally includes a first conductive layer with an input electrode, an output electrode, and a ground electrode. The ground electrode is disposed between the input electrode and the output electrode. In some implementations, the second conductive layer includes an input electrode, an output electrode, and a ground electrode. In some other implementations, a second conductive layer includes a pair of ground electrodes and a signal electrode in the form of an input or output electrode disposed between the ground electrodes. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. Sub-resonators can be defined in different regions of the structure, such that the piezoelectric layer is capable of moving to produce an output signal having frequencies at a first resonant frequency and a second resonant frequency.01-24-2013
20130021303TOUCH SENSING DISPLAY DEVICES AND RELATED METHODS - The present disclosure provides systems, methods, and apparatus relating to touch sensing display devices that include a sensing device and a display device. In one aspect, a touch sensing display device can include adaptive addressing architecture to adjust an addressing characteristic based at least in part in a sensing characteristic of a sensing device. In another aspect, a touch sensing display device can include adaptive sensing architecture to adjust a sensing characteristic of a sensing device based at least in part on an addressing characteristic of a display device and/or on an electrical interference characteristic altered by an addressing circuit of the display device.01-24-2013
20130016037REDUCING OR ELIMINATING THE BLACK MASK IN AN OPTICAL STACKAANM Wang; Hung-JenAACI Longtan TownshipAACO TWAAGP Wang; Hung-Jen Longtan Township TW - A reflective subpixel array may be formed in which an absorption layer is formed on a back substrate, which may obviate the need for a black mask on a front substrate upon which the reflective subpixel array is formed. In some implementations, the black mask layer may be formed only in post areas on the front substrate. The absorption layer may absorb light that enters between subpixel rows and/or columns. The absorption layer may include at least one highly conductive layer that can form part of the signal routing for the display. Conductive spacers may be formed to connect the conductive absorption layer to a conductive layer of the subpixel array.01-17-2013
20130009855METHOD AND DEVICE FOR MANIPULATING COLOR IN A DISPLAY - Embodiments include methods and devices for controlling the spectral profile and color gamut of light produced by an interferometric display. Such devices include illuminating a display with selected wavelengths of light. Embodiments also include a display comprising separate sections that output different predetermined colors of light. Other embodiments include methods of making the aforementioned devices.01-10-2013
20120327288IMAGING METHOD AND SYSTEM WITH ANGLE-DISCRIMINATION LAYER - This disclosure provides systems, methods and apparatus for an imaging system that includes a light guide having light-turning features that are configured to receive ambient light incident on the light guide, including light scattered from a scene to be imaged, and to direct the received ambient light towards an image sensor. The light-turning features may have angle-discriminating properties so that some light-turning features capture light incident upon the light guide at certain angles of incidence, but not others. Light scattered from multiple parts of a scene to be imaged may then be directed to correlated locations on an image sensor, which provides electronic data representing an image.12-27-2012
20120327092PLANARIZED SPACER FOR COVER PLATE OVER ELECTROMECHANICAL SYSTEMS DEVICE ARRAY - This disclosure provides systems, methods and apparatus for a MEMS device. In one aspect, an electromechanical systems apparatus includes a substrate, a stationary electrode positioned over the substrate, a movable electrode spaced from the stationary electrode by a gap, and at least one support structure extending above the movable electrode. The support structure includes an inorganic dielectric layer and a polymer layer.12-27-2012
20120327029TOUCH INPUT SENSING USING OPTICAL RANGING - This disclosure provides systems, methods and apparatus for touch systems. In one aspect, the touch system can include at least one light guide optically coupled to at least one light source and at least one optical detector. The light guide can be configured to transmit light from at least one light source across the surface in at least one direction and to receive at least a portion of the transmitted light reflected in an opposite direction in response to at least one reflecting object on the surface. The touch system also can include a touchscreen transceiver. The touch system can be configured to determine a location of at least one reflecting object on the surface by identifying a position of where the light guide or the touchscreen transceiver receives the reflected light and by determining time-of-flight of the transmitted light and the reflected light.12-27-2012
20120320108METHOD AND SYSTEM FOR REDUCING POWER CONSUMPTION IN A DISPLAY - A method and system for reducing power consumption in a display includes driving a display comprising a plurality of display elements having selectable resolution, wherein the display device is configured to operate at a plurality of selectable operational modes. In a first operational mode, data at a first resolution is provided to the display at a first data rate, and in a second operational mode, data at a second resolution is provided to the display at a second data rate.12-20-2012
20120320010BACKLIGHT UTILIZING DESICCANT LIGHT TURNING ARRAY - An interferometric display comprises a backlight with light extraction features formed from a desiccant material within the display. A light source is positioned at one or more edges or corners of the back glass, and the desiccant based features patterned in or on the back glass remove unwanted moisture and create uniform light extraction from the back glass.12-20-2012
20120314545METHOD AND SYSTEM FOR UPDATING OF DISPLAYS SHOWING DETERMINISTIC CONTENT - A method and apparatus for displaying image data on a display device is disclosed. In some embodiments, the method includes updating at least a portion of the display device based on image update data identifying pixels that changed from the preceding image to the following image.12-13-2012
20120299886DEVICE HAVING A CONDUCTIVE LIGHT ABSORBING MASK AND METHOD FOR FABRICATING SAME - A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device includes a substrate, a plurality of optical elements on the substrate, each optical element having an optical characteristic which changes in response to a voltage applied to the optical element, and a light-absorbing, electrically-conductive optical mask disposed on the substrate and offset from the plurality of optical elements, the optical mask electrically coupled to one or more of the optical elements to provide electrical paths for applying voltages to the optical elements. In another embodiment, a method of providing an electrical signal to optical elements of a display comprises electrically coupling an electrically-conductive light-absorbing mask to one or more optical elements, and applying a voltage to the mask to activate the one or more optical elements.11-29-2012
20120294037ILLUMINATION DEVICE - This disclosure provides systems, methods and apparatus for illumination devices. In one aspect, an illumination device having a longitudinal axis includes a light source and a light guide. The light guide has a peripheral edge, a transmissive illumination surface, a center portion, and an upper surface. The transmissive illumination surface is oriented perpendicular to the longitudinal axis and disposed between the center portion and the peripheral edge. The upper surface is oriented relative to the illumination surface to define an angle α therebetween. In some implementations, the angle α can be greater than 15 degrees, for example.11-22-2012
20120293520PIEZOELECTRIC RESONATORS WITH CONFIGURATIONS HAVING NO GROUND CONNECTIONS TO ENHANCE ELECTROMECHANICAL COUPLING - This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, resonator apparatus includes a first conductive layer including a first electrode and a second electrode. The first electrode is coupled to receive a first input signal, and the second electrode is coupled to provide a first output signal. A piezoelectric layer includes a piezoelectric material. The piezoelectric layer has a first side and a second side opposite the first side. The first side is proximate the first conductive layer, and the second side is electrically isolated from ground. In some examples, the second side of the piezoelectric layer can be exposed and/or electrically de-coupled from one or more components.11-22-2012
20120287138ELECTROMECHANICAL DEVICE CONFIGURED TO MINIMIZE STRESS-RELATED DEFORMATION AND METHODS FOR FABRICATING SAME - Embodiments of MEMS devices include a movable layer supported by overlying support structures, and may also include underlying support structures. In one embodiment, the residual stresses within the overlying support structures and the movable layer are substantially equal. In another embodiment, the residual stresses within the overlying support structures and the underlying support structures are substantially equal. In certain embodiments, substantially equal residual stresses are be obtained through the use of layers made from the same materials having the same thicknesses. In further embodiments, substantially equal residual stresses are obtained through the use of support structures and/or movable layers which are mirror images of one another.11-15-2012
20120286886Electromechanical Systems Oscillator with Piezoelectric Contour Mode Resonator for Multiple Frequency Generation - Electromechanical systems resonator structures, devices, circuits, and systems are disclosed. In one aspect, an oscillator includes an active component and a passive component connected in a feedback configuration. The passive component includes one or more contour mode resonators (CMR). A CMR includes a piezoelectric layer disposed between a first conductive layer and a second conductive layer. The conductive layers include an input electrode and an output electrode. The passive component is configured to output a first resonant frequency and a second resonant frequency, which is an odd integer harmonic of the first resonant frequency. The active component is configured to output a signal including the first resonant frequency and the second resonant frequency. This output signal can be a substantially square wave signal, which can serve as a clock in various applications.11-15-2012
20120281270DEVICES AND METHODS FOR ACHIEVING NON-CONTACTING WHITE STATE IN INTERFEROMETRIC MODULATORS - This disclosure provides systems, methods and apparatus for providing white light color output from an electromechanical systems (EMS) device with reduced likelihood of stiction. In one aspect, interferometric modulators are configured to provide a white color output while having a non-zero modulator gap dimension. Such a feature can reduce problems associated with zero modulator gap dimensions such as stiction. Various methodologies can be used to yield such a non-zero modulator gap and a white color output. In some implementations, for example, an optical element that introduced wavelength dependent phase shift is used. In some implementations this wavelength dependent phase shifting optical element includes a stack of color filters, a hologram, a diffraction grating, or layers of material having specific thicknesses and wavelength dependent indices of refraction.11-08-2012
20120274666SYSTEM AND METHOD FOR TUNING MULTI-COLOR DISPLAYS - This disclosure provides systems, methods and apparatuses, including computer programs encoded on computer-readable storage media, for calibrating a display. In one aspect, a method of calibrating a display includes determining one or more array voltages and, based on the determined array voltages, determining one or more drive scheme voltages. The determined drive scheme voltages may include, for example, a single segment voltage applied to all of the display elements of the array, and multiple common voltages applies to multiple subsets of the display elements of the array.11-01-2012
20120274647PIEZOELECTRIC RESONATORS AND FABRICATION PROCESSES - This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a sacrificial layer is deposited on an insulating substrate. A lower electrode layer is formed proximate the sacrificial layer. A piezoelectric layer is deposited on the lower electrode layer. An upper electrode layer is formed on the piezoelectric layer. At least a portion of the sacrificial layer is removed to define a cavity such that at least a portion of the lower electrode layer is spaced apart from the insulating substrate.11-01-2012
20120274611THIN FILM TRANSISTORS (TFT) ACTIVE-MATRIX IMOD PIXEL LAYOUT - This disclosure provides systems, methods and apparatus relating to pixel designs for use in active matrix displays which employ poly-silicon (p-Si) thin-film transistors (TFTs) having dual gate structures to control the pixels. The poly-silicon island of the TFT is configured to take advantage of the black mask area attributable to other non-reflective display components, thus enhancing the fill factor of the display.11-01-2012
20120274602WIRING AND PERIPHERY FOR INTEGRATED CAPACITIVE TOUCH DEVICES - This disclosure provides systems, methods and apparatus for a projected capacitive touch (PCT) sensor that may include thin sensor electrodes coated with additional layers to form an optical cavity that reinforces a wavelength range or color of incident light. The sensor electrodes and a cover glass border and/or decorations may be fabricated simultaneously. In some implementations, the thickness of the optical cavity will be selected such that the “color” of reflected light is black. The sensor electrodes may not be noticeable to a human observer. However, in some other implementations, the thickness of the optical cavity may be selected such that the sensor electrodes and/or the decorative portions will have another color. Routing wires of the touch sensor may be shielded by a grounded conductive layer in the border.11-01-2012
20120268479METHODS AND APPARATUS FOR IMPROVED DITHERING ON A LINE MULTIPLIED DISPLAY - This disclosure provides systems, methods and apparatus including computer programs encoded on computer storage media for producing line multiplied images with better visual appearance. In one aspect, before lines of the image are multiplied, they are dithered with a noise signal that increases faster with higher frequency along the multiplied dimension of the image data than along the non multiplied dimension of the image. This results in a line multiplied image was improved image quality.10-25-2012
20120268440WIDENING RESONATOR BANDWIDTH USING MECHANICAL LOADING - This disclosure provides systems, apparatus and techniques by which electromechanical resonators are implemented. In one aspect, by mechanically loading the resonator body in specific ways, multiple resonance modes are created within the resonator body resulting in wider bandwidths.10-25-2012
20120268430MECHANICAL LAYER AND METHODS OF MAKING THE SAME - This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.10-25-2012
20120256819INTERFEROMETRIC MODULATOR ARRAY WITH INTEGRATED MEMS ELECTRICAL SWITCHES - An array of display elements, such as interferometric modulators, is integrated with collapsible cavity microelectromechanical system (MEMS) electrical switches. The electrical switches and the display elements may be at least partially formed with the same manufacturing operations. The switches may form row or column select functions for the display elements.10-11-2012
20120256615MEASUREMENT AND APPARATUS FOR ELECTRICAL MEASUREMENT OF ELECTRICAL DRIVE PARAMETERS FOR A MEMS BASED DISPLAY - Methods and devices to measure voltage margins of electromechanical devices are disclosed. The voltage margins are determined based on responses to test voltages which cause the devices to change states. State changes of the devices are detected by monitoring integrated current or charge used to drive the devices with the test voltages.10-11-2012
20120249558PIXEL VIA AND METHODS OF FORMING THE SAME - This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask on a substrate at each of four corners and along at least one edge region of each pixel, depositing a dielectric layer over the black mask, depositing an optical stack including a stationary electrode over the dielectric layer, and depositing a mechanical layer over the optical stack. The method further includes providing a conductive via in a first pixel of the plurality of pixels, the via disposed in the dielectric layer and electrically connecting the stationary electrode to the black mask, the via disposed in a position along an edge of the first pixel, spaced offset from the edge of the first pixel in a direction towards the center of the first pixel.10-04-2012
20120249519DUMMY PIXELS MADE INACTIVE - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for preventing the edge subpixels of a display from actuating. Some implementations provide a small conductive via inside edge subpixels of a passively-addressed display, such as a microelectromechanical systems (MEMS)-based display. The vias may be configured to make an electrical connection between a movable conductive layer and another conductive layer of the edge subpixel. Electricity may be provided to the active subpixel array by way of these vias in the edge subpixels. The concepts provided herein apply to other types of passively-addressed displays, such as organic light-emitting diode (“OLED”) displays and field emission displays.10-04-2012
20120249122MEASUREMENT AND APPARATUS FOR ELECTRICAL MEASUREMENT OF ELECTRICAL DRIVE PARAMETERS FOR A MEMS BASED DISPLAY - Methods and devices to measure voltage margins of electromechanical devices are disclosed. The voltage margins are determined based on responses to test voltages which cause the devices to change states. State changes of the devices are detected by monitoring integrated current or charge used to drive the devices with the test voltages.10-04-2012
20120248478PIXEL VIA AND METHODS OF FORMING THE SAME - This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask on a substrate at each of four corners of each pixel, depositing a dielectric layer over the black mask, depositing an optical stack including a stationary electrode over the dielectric layer, depositing a mechanical layer over the optical stack, and anchoring the mechanical layer over the optical stack at each corner of each pixel. The method further includes providing a conductive via in a first pixel of the plurality of pixels, the via in the dielectric layer electrically connecting the stationary electrode to the black mask, the via disposed at a corner of the first pixel, offset from where the mechanical layer is anchored over the optical stack in an optically non-active area of the first pixel.10-04-2012
20120242638DIELECTRIC SPACER FOR DISPLAY DEVICES - This disclosure provides systems, methods and apparatus for forming spacers on a substrate and building an electromechanical device over the spacers and the substrate. In one aspect, a raised anchor area is formed over the spacer by adding layers that result in a high point above the substrate. The high point can protect the movable sections of the MEMS device from contact with a backplate.09-27-2012
20120236390LIGHT TURNING FEATURE PATTERNS FOR LIGHTGUIDES - This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light and for determining spacing between light turning features in the light guide. In one aspect, a light intensity profile along a first axis is determined and the pitch of light turning features along that first axis is varied based upon this profile, while the pitch along a second crossing axis (for example, an orthogonal axis) and the sizes of the light turning features remain unchanged. In some implementations, an apparatus includes a light guide having an array of light turning features configured to turn light from at least one light emitter. The light turning features can be non-uniformly spaced apart along a first axis such that pitches vary non-monotonically and, along a second axis that crosses the first axis, the light turning features are spaced apart with substantially the same progression.09-20-2012
20120236049COLOR-DEPENDENT WRITE WAVEFORM TIMING - This disclosure provides systems, methods and apparatus including computer programs encoded on computer storage media, for driving a pixel of a display. In one aspect, a common driver may be configured to write data to different display elements in an array of display elements with different line times. By using different line times, a refresh rate of the display may be increased and the response of the display elements to the write waveform may be improved.09-20-2012
20120236042WHITE POINT TUNING FOR A DISPLAY - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for tuning the white point of a display device. In one aspect, a display device includes a set of display elements configured to output light and electronics configured to drive the display elements. Each display element can have an on-state where a reflective surface can be positioned at a distance from a partially reflective surface such that the display element can reflect incident light. Each distance can be dependent on a bias voltage. At least one of the bias voltages for the display elements can be non-zero in the on-state, and one or more of the bias voltages may be adjustable to control a white point of the display device. The electronics can be electrically connected to the display elements to provide the at least one non-zero bias voltage.09-20-2012
20120236021METHODS AND APPARATUS FOR DITHER SELECTION - Systems, methods and apparatus including computer programs encoded on computer storage media optimize display image quality under a variety of imaging environments. Dynamic frame streams such as those present in video applications may require a higher frame rate to adequately convey motion in the stream. A line multiplying image pipeline may be utilized for dynamic frames, which lowers the resolution of the displayed image. When dithering line multiplied images, a noise signal including asymmetrical high frequency components around zero frequency may be utilized. The display of static frames, such as photographs, may be achieved with acceptable image quality using a relatively lower display frame rate. Such a frame rate may enable the display of a high resolution image. A noise signal tailored for higher resolution, non line multiplied frames, such as a noise signal with symmetric high frequency components around zero frequency may be utilized for static frames.09-20-2012
20120236009INACTIVE DUMMY PIXELS - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for a display with inactive dummy pixels. A display apparatus may include subpixels having a first electrode layer and a second electrode layer. The first electrode layer of an edge subpixel may include an opening, which may be made large enough to prevent the edge subpixel from actuating. The size of the openings also may be selected to attain a desired overall reflectivity for an array of edge subpixels. For example, the size of the openings may be selected to make the reflectivity of an edge pixel array similar to the reflectivity of a routing area.09-20-2012
20120235985SYSTEM AND METHOD OF UPDATING DRIVE SCHEME VOLTAGES - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for calibrating display arrays. In one aspect, a method of calibrating a display array includes determining a particular drive response characteristic and updating a particular drive scheme voltage between updates of image data on the display array.09-20-2012
20120235981SYSTEM AND METHOD OF SENSING ACTUATION AND RELEASE VOLTAGES OF AN INTERFEROMETRIC MODULATOR - A method for sensing the actuation and/or release voltages of a electromechanical system or a microelectromechanical device include applying a varying voltage to the device and sensing its state and different voltage levels. In one embodiment, the device is part of a system comprising an array of interferometric modulators suitable for a display. The method can be used to compensate for temperature dependent changes in display pixel characteristics.09-20-2012
20120235976SYSTEM AND METHOD FOR PROVIDING POSITIVE AND NEGATIVE VOLTAGES FROM A SINGLE INDUCTOR - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for providing positive and negative voltages of a power supply. In one aspect, the power supply includes an inductor having a first end coupled via a source switch to a voltage source and coupled via a first plurality of output switches to a respective plurality of negative outputs and a second end coupled via a ground switch to a ground potential and coupled via a second plurality of output switches to a respective plurality of positive outputs and a controller adapted to configure the switches into at least one of multiple configurations.09-20-2012
20120235970THIN FILM DESICCANT AND METHOD OF FABRICATION - This disclosure provides systems, methods and for providing a desiccant in a MEMS package. A MEMS device may be packaged with a desiccant to provide a moisture-free environment. In order to avoid undesirable effects on the MEMS device, the desiccant may be selected or treated so as to be compatible with a particular MEMS device, for instance, a very thin profile may be desired. A method for covalently bonding zeolite crystals with a substrate is provided such that a layer of zeolite crystals is covalently attached to a substrate surface of the MEMS device package. This bonding includes a change in the chemical structure of the zeolite such that is chemically adhered to the substrate.09-20-2012
20120235969THIN FILM THROUGH-GLASS VIA AND METHODS FOR FORMING SAME - This disclosure provides systems, methods and apparatus providing electrical connections through glass substrates. In one aspect, a thin film through-glass via including a through-glass via hole and a thin conductive film that conformally coats the sidewalls of the through-glass via hole is provided. A contour of a through-glass via hole may include concave portions that overlap at a midsection of the glass, with the through-glass via hole sidewalls curved inward to form the concave portions. In another aspect, one or more methods of forming through-glass vias are provided. In some implementations, the methods include double-sided processes to form aligned via holes in a glass substrate that together form a contoured through-glass via hole, followed by deposition of a thin continuous film of a conductive material.09-20-2012
20120235968METHOD AND APPARATUS FOR LINE TIME REDUCTION - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for reducing common line write time in a display. In one aspect, a common line write waveform shape is based at least in part on the distance a given common line is from a segment driver circuit.09-20-2012
20120235959SEAL ANCHOR STRUCTURES - This disclosure provides systems, methods and apparatus for forming raised anchor structures in a seal area. In one aspect, the anchor structures include a receiving space. Sealant can flow into the receiving spaces. In one aspect the receiving space is formed by an overhang section. In one aspect, the overhang can be formed in part by removing a sacrificial layer. The raised anchor structures in the seal area can improve adhesion between two plates by acting as mechanical hooks, further securing the plates together.09-20-2012
20120234093MICROELECTROMECHANICAL SYSTEM DEVICE INCLUDING A METAL PROOF MASS AND A PIEZOELECTRIC COMPONENT - This disclosure provides systems, apparatus, and devices and methods of fabrication for electromechanical devices. In one implementation, an apparatus includes a metal proof mass and a piezoelectric component as part of a MEMS device. Such apparatus can be particularly useful for MEMS gyroscope devices. For instance, the metal proof mass, which may have a density several times larger than that of silicon, is capable of reducing the quadrature and bias error in a MEMS gyroscope device, and capable of increasing the sensitivity of the MEMS gyroscope device.09-20-2012
20120230054LARGE AREA LIGHT PANEL AND SCREEN - Embodiments of a panel lighting apparatus and methods of its manufacture are described. In one embodiment, the apparatus can include a light source, an at least partially transparent panel comprising a planar front surface and a planar back surface, the panel disposed in conjunction with the light source such that light from the light source is input into at least one edge of the panel and guided therein, and a plurality of light extraction dots disposed on the planar back surface, the plurality of light extraction dots configured to reflect light incident on the planar back surface and extract light from the light source propagating in the panel through the planar front surface.09-13-2012
20120230053LARGE AREA LIGHT PANEL AND SCREEN - Embodiments of a panel lighting apparatus and methods of its manufacture are described. In one embodiment, the apparatus can include a light source, an at least partially transparent panel comprising a planar front surface and a planar back surface, the panel disposed in conjunction with the light source such that light from the light source is input into at least one edge of the panel and guided therein, and a plurality of light extraction dots disposed on the planar back surface, the plurality of light extraction dots configured to reflect light incident on the planar back surface and extract light from the light source propagating in the panel through the planar front surface.09-13-2012
20120229709TREATMENT OF A SELF-ASSEMBLED MONOLAYER ON A DIELECTRIC LAYER FOR IMPROVED EPOXY ADHESION - This disclosure provides systems, methods, and apparatus for treating a self-assembled monolayer coating on a dielectric layer to improve epoxy adhesion to the self-assembled monolayer coating. In implementations of the methods, a dielectric layer on a surface of a substrate is provided. A self-assembled monolayer coating is formed on the dielectric layer. A seal region of the self-assembled monolayer coating is selectively treated. A component is bonded to the seal region of the self-assembled monolayer coating with an epoxy. Implementations of the methods may be used to encapsulate an electromechanical systems device on the substrate with a cover using an epoxy.09-13-2012
20120229121SYSTEM AND METHOD FOR DETECTING SURFACE PERTURBATIONS - This disclosure provides systems, methods and apparatus for assessing a surface using a piezoelectric element. In one aspect, the method includes applying a device to the surface, wherein the device includes at least one piezoelectric element and at least one EMS device, wherein the EMS device includes a conductive first layer separated from a conductive second layer, and wherein the piezoelectric element is electrically coupled to the EMS device such that a force applied to the piezoelectric element results in a voltage applied across the first and second layers.09-13-2012
20120217881ILLUMINATION SYSTEMS WITH NATURAL AND ARTIFICIAL LIGHT INPUTS - This disclosure provides systems, methods, and apparatus for illumination systems with natural and artificial light inputs. In one aspect, an apparatus can include a natural light collection system, an artificial light collection system, an illumination panel, and a control system. The illumination panel can be optically coupled to the natural light collection system and the artificial light collection system to receive natural and artificial light. The control system can be coupled to the artificial light system and can be configured to control the artificial light system.08-30-2012
20120212796SYSTEM AND METHOD OF REDUCING COLOR SHIFT IN A DISPLAY - A system and method of reducing color shift in a display includes an interferometric modulator display configured to reflect light from at least one light source and through at least one converging optical element in an optical path from the light source to a viewer via the display. In one embodiment, the converging optical element comprises a diffractive optical element.08-23-2012
20120212795INTERFEROMETRIC MODULATOR IN TRANSMISSION MODE - A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.08-23-2012
20120212468METHOD AND APPARATUS FOR SENSING, MEASUREMENT OR CHARACTERIZATION OF DISPLAY ELEMENTS INTEGRATED WITH THE DISPLAY DRIVE SCHEME, AND SYSTEM AND APPLICATIONS USING THE SAME - Methods and systems for electrical sensing, measurement and characterization of display elements are described. An embodiment includes integrating the electrical sensing, measurement and characterization with the display drive scheme. This embodiment allows for measurement of DC or operational hysteresis voltages and/or response times of interferometric modulator MEMS devices, for example, to be fully integrated with the display driver IC and/or the display drive scheme. Another embodiment allows these measurements to be performed and used without resulting in display artifacts visible to a human user. Another embodiment allows the measurement circuitry to be integrated with the display driver IC and/or the display drive scheme re-using several existing circuitry components and features, thus allowing for integration of the measurement method and its use relatively easily.08-23-2012
20120212289EMS TUNABLE TRANSISTOR - A field effect transistor comprises an electrostatically moveable gate electrode. The moveable gate is supported by at least two posts, and the source, drain, and channel of the transistor are centrally located under the moveable layer. At least one electrode is positioned on at least two sides of the source, drain, and channel.08-23-2012
20120211053PHOTOVOLTAICS WITH INTERFEROMETRIC RIBBON MASKS - An interferometric mask covering a reflective conductive ribbon that electrically interconnects a plurality of photovoltaic cells is disclosed. Such an interferometric mask may reduce reflections of incident light from the conductors. In various embodiments, the mask reduces reflections, so that a front and back electrode pattern appears black or similar in color to surrounding features of the device. In other embodiments, the mask may modulate reflections of light such that the electrode pattern matches a color in the visible spectrum.08-23-2012
20120206788INTEGRATED MODULATOR ILLUMINATION - A spatial light modulator includes an array of elements to modulate light in accordance with image data. The modulator has a display panel having first and second surfaces arranged adjacent to the array of elements such that the second surface is directly adjacent the array of elements to allow a viewer to view an image produced by modulation of light. The modulator may also include a light source to provide light to the display panel and illumination dots on the first surface of the display panel to reflect light from the source to the array of elements.08-16-2012
20120206462MEMS CAVITY-COATING LAYERS AND METHODS - Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.08-16-2012
20120194897BACKSIDE PATTERNING TO FORM SUPPORT POSTS IN AN ELECTROMECHANICAL DEVICE - This disclosure provides systems, methods and apparatus for backside patterning of structures in electromechanical devices. In one aspect, backside patterning of supports in an electromechanical device allows the size of the supports to be reduced, increasing the active region of the electromechanical device. In electromechanical devices having black masks, the black masks may include a partially transmissive aperture aligned with the supports which enable backside patterning of the support through the black mask. The black mask may include an interferometric black mask in which an upper reflective layer has been patterned to form an aperture extending therethrough.08-02-2012
20120194896DISPLAY WITH INTEGRATED PHOTOVOLTAICS - A display with patterned photovoltaic (PV) material integrated on the front side and/or back side of the display is disclosed. Light may reach PV material situated behind a display through fully or partially transmissive features or gaps within the display. Display-generated light may also reach PV material behind a display. A patterned PV material situated in front of a display may collect both ambient light as well as display-generated light.08-02-2012
20120194496APPARATUS AND METHOD FOR SUPPORTING A MECHANICAL LAYER - This disclosure provides systems, methods and apparatuses for supporting a mechanical layer. In one aspect, an electromechanical systems device includes a substrate, a mechanical layer, and a post positioned on the substrate for supporting the mechanical layer. The mechanical layer is spaced from the substrate and defines one side of a gap between the mechanical layer and the substrate, and the mechanical layer is movable in the gap between an actuated position and a relaxed position. The post includes a wing portion in contact with a portion of the mechanical layer, the wing portion positioned between the gap and the mechanical layer. The wing portion can include a plurality of layers configured to control the curvature of the mechanical layer.08-02-2012
20120188215ELECTROMECHANICAL DEVICES WITH VARIABLE MECHANICAL LAYERS - An electromechanical systems array includes a substrate and a plurality of electromechanical systems devices. Each electromechanical systems device includes a stationary electrode, a movable electrode, and an air gap defined between the stationary electrode and the movable electrode, where the air gap defines open and collapsed states. At least two different electromechanical systems device types correspond to finished devices having different sized air gaps when in the open state. Each electromechanical systems device further includes a primary mechanical layer of a common thickness along with one or more mechanical sub-layers with a different cumulative thickness for each of the at least two different electromechanical systems device types. The mechanical sub-layers can be deposited for use as etch stops during processing of the air gap. The different air gap sizes of each electromechanical systems device type can correspond to a different mechanical sub-layer thickness.07-26-2012
20120182595PHOTONIC MEMS AND STRUCTURES - An interference modulator (IMod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on continuous web fed process. IMods can be used as test structures for evaluation of residual stress in deposited materials.07-19-2012
20120180855PHOTOVOLTAIC DEVICES AND METHODS OF FORMING THE SAME - This disclosure provides photovoltaic apparatus and methods of forming the same. In one implementation, a photovoltaic device includes a transparent insulator, a first thin film solar subcell disposed on a first surface of the transparent insulator, and a second thin film solar subcell disposed on a second surface of the transparent insulator opposite the first surface. The first solar subcell is configured to receive ambient light, and the second solar subcell is configured to receive a portion of light that propagates through the first solar subcell. The second solar subcell includes a first electrode including a conductive reflective layer configured to reflect light that propagates through a photovoltaic structure of the second subcell back toward the first solar subcell.07-19-2012
20120170310LIGHT GUIDE WITH UNIFORM LIGHT DISTRIBUTION - This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light. In one aspect, the light guide has a light input edge into which light is injected and transverse edges transverse to the light input edge. The transverse edges are smooth and act as specular reflectors. The light input edge is rough and provides a diffusive interface. The light emitters are adjacent and centered along the light input edge, with the pitch of the light emitters being about ΔL, where ΔL is the distance between the transverse edges divided by the number of light emitters. The light guide can be provided with light turning features that redirect light out of the light guide. In some implementations, the redirected light can be applied to illuminate a display.07-05-2012
20120170047SYSTEM AND METHOD FOR MEASURING A DISTANCE - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for measuring a distance. In one aspect, the method includes actuating or releasing an interferometric modulator having a first surface and a second surface and measuring a distance between the first and second surfaces at a plurality of times during the actuation or release. In another aspect, the method includes illuminating, with a first laser beam having a first wavelength and with a second laser beam having a second wavelength different from the first wavelength, an interferometric modulator having a distance between a first surface which is at least partially reflective and a second surface which is at least partially absorptive, measuring a first intensity of the first laser beam modulated by the interferometric modulator and a second intensity of the second laser beam modulated by the interferometric modulator, and determining the distance based on the measured intensities.07-05-2012
20120169743MICROELECTROMECHANICAL DEVICE WITH THERMAL EXPANSION BALANCING LAYER OR STIFFENING LAYER - An interferometric modulating device is provided with a thermal expansion balancing layer on a side of the movable flexible layer opposite the movable reflector such that when temperature changes the distance between the movable reflector and the optical stack does not change significantly, thereby leading to stable color. Additionally, an interferometric modulating device is provided with a stiffening layer between the movable flexible layer and the movable reflector and at least one hollow void exists on the surface where the movable reflector and the stiffening layer contact each other so that the movable reflector is more rigid to bending, thereby reducing the temperature sensitivity of the movable reflector.07-05-2012
20120162732DEVICE AND METHOD FOR A HOLOGRAPHIC DISPLAY WITH ELECTROMECHANICAL ACTUATED MIRROR DISPLAY - The present disclosure provides systems, methods and apparatus for producing holographic displays using an electromechanical systems device. In one aspect, the method can be implemented to allow for simultaneous modulation of phase and amplitude of light in a display device composed of a plurality of pixels. A light source can provide sufficiently coherent light to a light guide, which can direct the light to a plurality of reflective members. The reflective members can reflect the light to a pinhole-lenslet array. The combination of the pinhole-lenslet array and the reflective members can act as a spatial light modulator, modulating the phase and amplitude of the light reflected by the reflective members. The lenslet can focus the light to a plane at the opening of the pinhole, wherein the light can exit the pinhole to be viewed in combination with light from additional pixels, and can be viewed as a holographic image.06-28-2012
20120162232METHOD OF FABRICATION AND RESULTANT ENCAPSULATED ELECTROMECHANICAL DEVICE - This disclosure provides systems, methods, and apparatus for encapsulated electromechanical systems. In one aspect, a release path includes a release hole through an encapsulation layer. The release path exposes a portion of a first sacrificial layer that extends beyond a second sacrificial layer in a horizontal direction. This allows the first sacrificial layer and the second sacrificial layer to later be etched through the release path. The corresponding electromechanical system device includes a shell layer encapsulating a mechanical layer. A conformal layer seals a release hole that extends through a shell layer. A portion of the conformal layer blocks the opening of the release passage within the release hole. The release passage has substantially the same vertical height as a gap that defines the spacing between the mechanical layer and a substrate.06-28-2012
20120161009INTEGRATED LIGHT EMITTING AND LIGHT DETECTING DEVICE - Methods and systems for providing a light device that can emit light and sense light are disclosed. In one embodiment, a lighting device includes a light guide having a planar first surface, the light guide configured such that at least some ambient light enters the light guide through the first surface and propagates therein, and at least one light detector disposed along an edge of the light guide, the at least one detector optically coupled to the light guide to receive light propagating therein. The light detector can be configured to produce a control signal. In some embodiments, the lighting device also includes at least one light turning feature disposed on the first surface, the at least one light turning feature configured to direct light incident into the light guide through the first surface.06-28-2012
20120154881HOLOGRAPHIC BRIGHTNESS ENHANCEMENT FILM - This disclosure provides systems, methods and apparatus, including a display device that includes an overlying holographic film. In one aspect, the holographic film includes a hologram that is configured to turn light incident on the film. The light is turned towards the display device at desired angles. The display can be formed of interferometric modulators and the turned light can be reflected off the display, and towards a viewer, to form an image. For light that is incident on the film at angles outside of a view cone, the holographic film is provided with holographic light turning features that turn this light so that it is reflected off the display at angles within a view cone of the display.06-21-2012
20120154690FLEXIBLE INTEGRATED CIRCUIT DEVICE LAYERS AND PROCESSES - This disclosure provides systems, processes, and apparatus implementing and using techniques for fabricating flexible integrated circuit (IC) device layers. In one implementation, a sacrificial layer is deposited on a substrate. The sacrificial layer can include amorphous silicon or molybdenum, by way of example. One or more electronic components are formed on the sacrificial layer. A polymer coating is provided on the one or more electronic components to define a coated device layer. The sacrificial layer is removed to release the coated device layer from the substrate. The sacrificial layer can be removed using a xenon difluoride gas or by etching, for example. Coated device layers made in accordance with this process can be stacked. The substrate can be formed of glass, silicon, a plastic, a ceramic, a compound semiconductor, and/or a metal, depending on the desired implementation. The electronic component(s) can include a passive component such as a resistor, an inductor, or a capacitor. The electronic component(s) can also or alternatively include an active component such as a transistor.06-21-2012
20120154333CAPACITIVE MEMS-BASED DISPLAY WITH TOUCH POSITION SENSING - A micro-electro-mechanical systems (MEMS) pixel for display and touch position sensing includes a substrate and a capacitive element. The capacitive element includes one or more pixels having a first conductive platelet above the substrate, and a second conductive platelet above and spaced apart from the first conductive platelet, the two platelets forming the capacitive element. A connection to each platelet provides for applying a voltage, wherein the platelet separation changes according to the applied voltage. A transparent dielectric plate, spaced apart from and positioned opposite the substrate, covers the at least one pixel. A capacitance sensing circuit attached to the connection to each platelet of the pixel senses changes in capacitance not resulting from the applied voltage.06-21-2012
20120153970CAPACITIVE TOUCH SENSING DEVICES AND METHODS OF MANUFACTURING THEREOF - The present disclosure provides systems, methods, and apparatus for sensing the location(s) of conductive objects disposed near a sensor array. In one aspect, a sensor array includes a conductive row and a conductive column formed of non-transparent material(s). At least a portion of the conductive row overlaps at least a portion of the conductive column and each of the conductive rows and columns include sensing elements. The sensing elements at least partially define volumes including non-conductive and optically transparent material(s) to limit the loss of light that passes therethrough.06-21-2012
20120152346LIGHT ABSORPTION-ENHANCING SUBSTRATE STACKS - This disclosure provides substrate stacks for use in photovoltaic cells and methods of manufacturing the same. In one aspect, a substrate stack can include a substrate layer having at least one surface with an RMS roughness value that is greater than 9 nm. The substrate stack can also include a transparent conductive oxide layer disposed over the substrate layer. The transparent conductive oxide layer can include at least a first surface with an RMS roughness value that is greater than 9 nm and a second surface with an RMS roughness value that is greater than 9 nm. The RMS roughness value of the second surface can be greater than the RMS value of the first surface.06-21-2012
20120140313MEMS DEVICE FABRICATED ON A PRE-PATTERNED SUBSTRATE - A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.06-07-2012
20120140312METHOD AND SYSTEM FOR PACKAGING A DEVICE - A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.06-07-2012
20120139976METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION - A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.06-07-2012
20120127556METHOD AND SYSTEM FOR PACKAGING A DISPLAY - A package structure and method of packaging for an interferometric modulator. A transparent substrate having an interferometric modulator formed thereon is provided. A backplane is joined to the transparent substrate with a seal where the interferometric modulator is exposed to the surrounding environment through an opening in either the backplane or the seal. The opening is sealed after the transparent substrate and backplane are joined and after any desired desiccant, release material, and/or self-aligning monolayer is introduced into the package structure.05-24-2012
20120122259METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL - Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.05-17-2012
20120120682ILLUMINATION DEVICE WITH LIGHT GUIDE COATING - This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light. In one aspect, the light guide includes a light turning film over an optically transmissive supporting layer. The light turning film may be formed of a material deposited in the liquid state. The light turning film may be formed of a photodefinable material, which may be glass, such a spin-on glass, or may be a polymer. In some other implementations, the glass is not photodefinable. The light turning film may have indentations that define light turning features and a protective layer may be formed over those indentations. The protective layer may also be formed of a glass material, such as spin-on glass. The light turning features in the light guide film may be configured to redirect light out of the light guide, for example, to illuminate a display.05-17-2012
20120120467HYBRID LIGHT GUIDE WITH FACETED AND HOLOGRAPHIC LIGHT TURNING FEATURES - The present disclosure provides systems, methods and apparatus to illuminate displays. In one aspect, an illumination device with a light guide can include both faceted and holographic light turning features. The holographic light turning features can be provided between the facets. The facets can eject light out of the light guide. The holographic light turning features also can eject light out of the light guide, or can collimate the light so that it propagates more nearly parallel to the major surfaces of the light guide, or both eject and collimate light. The ejected light can be used to illuminate a display.05-17-2012
20120120081ILLUMINATION DEVICE WITH PASSIVATION LAYER - This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light. In one aspect, a passivation layer is attached to the light guide of an illumination device. The passivation layer may be an optically transparent moisture barrier and may have a thickness and refractive index which allows it to function as an anti-reflective coating. The passivation layer may protect moisture-sensitive underlying features, such as metallized light turning features that may be present in the light guide. The light turning features may be configured to redirect light out of the light guide. In some implementations, the redirected light may be applied to illuminate a display.05-17-2012
20120120080LIGHT GUIDE WITH DIFFUSIVE LIGHT INPUT INTERFACE - This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light. In one aspect, the light guide has a surface, such as an edge, into which light is injected. The surface is treated to create a diffusive interface with a light source. For example, the surface may be subjected to abrasion to form a frosted surface that acts as the diffusive interface, or a diffusive structure may be attached to the edge, with the attached diffusive structure functioning as the diffusive interface. The diffusive interface diffuses light entering into the light guide, and can thereby increase the uniformity of light propagating within the light guide. The light guide may be provided with light turning features that redirect light out of the light guide. In some implementations, the redirected light may be applied to illuminate a display.05-17-2012
20120116709DISPLAY-INTEGRATED OPTICAL ACCELEROMETER - An optical accelerometer and method of determining an acceleration are disclosed. In one aspect, an accelerometer includes a light source, a substrate, a light guide attached to a first side of the substrate and configured to redirect light from the light source through the substrate. The accelerometer also includes a light detector, a proof mass attached to a second side of the substrate via one or more springs, wherein the second side is opposite the first side and wherein motion of the proof mass alters a characteristic of the light from the light source reaching the light detector, and a processor configured to determine an acceleration based on the characteristic of the light reaching the light detector.05-10-2012
20120106200MANIFOLD FOR COLLIMATING LIGHT - The present disclosure provides systems, methods and apparatus to collimate light. In one aspect, a manifold to collimate light can be used to illuminate a display or project an image. The manifold can be formed of optically transmissive material and can have a backside for receiving light from a light source and a front wall, opposite the backside, for outputting collimated light. The front wall can include a plurality of lens. The upper and bottom walls of the manifold can extend along a curve from the backside to the front wall. The manifold can be hollowed, with an internal cavity that opens to the backside. The manifold can be configured to collimate light propagating in directions extending out of a plane, while light propagating from the light source in directions within the plane is not collimated or is less collimated.05-03-2012
20120105385ELECTROMECHANICAL SYSTEMS APPARATUSES AND METHODS FOR PROVIDING ROUGH SURFACES - This disclosure provides systems, methods, and apparatus for producing roughness in an electromechanical device by nucleation under plasma CVD conditions. In one aspect, a substrate and at least a first layer are provided. The disclosure further provides gas phase nucleating particles under plasma CVD conditions and depositing a first layer, where the particles are incorporated into the first layer to create roughness in the first layer. The roughness may be transferred to a second layer by conformal deposition of the second layer over the first layer. The roughness of the second layer corresponds to the roughness of the first layer, where the first layer has a roughness greater than or equal to about 20 Å root mean square (RMS).05-03-2012
20120099179METHOD AND DEVICE FOR PROVIDING ELECTRONIC CIRCUITRY ON A BACKPLATE - A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.04-26-2012
20120099178ELECTROMECHANICAL SYSTEM HAVING A DIELECTRIC MOVABLE MEMBRANE - An electromechanical device includes a partially reflective and partially transmissive layer and a movable functional element. The movable functional element includes a patterned flexible dielectric layer and a reflective layer mechanically coupled to the flexible dielectric layer. The patterned flexible dielectric layer is configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer. The reflective layer is situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.04-26-2012
20120099177SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE - A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.04-26-2012
20120099174METHOD OF FABRICATING MEMS DEVICES (SUCH AS IMod) COMPRISING USING A GAS PHASE ETCHANT TO REMOVE A LAYER - Improvements in an interferometric modulator that cavity defined by two walls.04-26-2012
20120098847SYSTEM AND METHOD FOR REDUCED RESOLUTION ADDRESSING - This disclosure provides systems, methods and apparatus including computer programs encoded on computer storage media for producing line multiplied images with better visual appearance. The line multiplying is shifted for one of the colors of the display with respect to at least one other color of the display.04-26-2012
20120092749DEVICES AND METHODS FOR ENHANCING COLOR SHIFT OF INTERFEROMETRIC MODULATORS - The color reflected by an interferometric modulator may vary as a function of the angle of view. A range of colors are thus viewable by rotating the interferometric modulator relative to an observer. By placing a textured layer between an observer and an interferometric modulator, a pattern which includes the range of colors may be viewed by the observer, and the range of colors may thus be viewable from a single viewing angle.04-19-2012
20120092747DISPLAY HAVING AN EMBEDDED MICROLENS ARRAY - The present disclosure provides methods, systems, and apparatus for directing incident light toward central regions of interferometric modulator displays. In one aspect, a display includes an array of microlenses embedded in a substrate adjacent a first surface of the substrate. An array of light modulators can be disposed over the first surface of the substrate. A light modulator can be disposed over a corresponding microlens. The microlenses can converge or concentrate incident light onto central regions of the corresponding light modulators. The microlenses may include single-element lenses, compound lenses, and/or graded-index lenses. Various methods of manufacturing such displays are also disclosed.04-19-2012
20120092396LUMINANCE BALANCING - A composite display is disclosed. In some embodiments, a composite display comprises a paddle configured to sweep out an area and a plurality of pixel elements mounted on the paddle. Selectively activating one or more of the plurality of pixel elements while the paddle sweeps the area causes at least a portion of an image to be rendered. In some embodiments, a characteristic of at least one pixel element of the plurality of pixel elements that is associated with balancing luminance across at least a portion of the composite display associated with the paddle is based at least in part on a radial distance of the one pixel element from an axis of rotation of the paddle.04-19-2012
20120092350WRAPAROUND ASSEMBLY FOR COMBINATION TOUCH, HANDWRITING AND FINGERPRINT SENSOR - This disclosure provides systems, methods and apparatus for a combined sensor device. In some implementations, a combined sensor device includes a wrap-around configuration wherein an upper flexible substrate has patterned conductive material on an extended portion to allow routing of signal lines, electrical ground, and power. One or more integrated circuits or passive components, which may include connecting sockets, may be mounted onto the flexible layer to reduce cost and complexity. Such implementations may eliminate a flex cable and may allow a bezel-less configuration.04-19-2012
20120092324TOUCH, HANDWRITING AND FINGERPRINT SENSOR WITH ELASTOMERIC SPACER LAYER - Use of a compliant, elastomeric layer between upper and lower substrates of the combination sensor can increase the sensitivity to applied pressure or force from a stylus, while increasing the lateral resolution for a given sensel pitch. The elastomeric material may have an index of refraction that is substantially similar to that of the upper and lower substrates. The elastomeric material may include open regions for the inclusion of force-sensitive resistors. With careful selection of the elastomeric and FSR materials, the loss of transmissivity that can accompany air gaps can be minimized.04-19-2012
20120092294COMBINATION TOUCH, HANDWRITING AND FINGERPRINT SENSOR - This disclosure provides systems, methods and apparatus implementations of a display device with a cover glass apparatus that serves as a single or multi-touch sensor, as a handwriting (or note capture) input device, and in some configurations as a fingerprint sensor. Sensor functionality and resolution can be tailored to specific locations on the cover glass apparatus. In some such implementations, the area in which the fingerprint sensing elements are located may provide not only fingerprint detection, but also handwriting and touch functionality. In some other implementations, the fingerprint sensor may be segregated into a separate, high-resolution zone that only provides fingerprint functionality.04-19-2012
20120092293CONTROLLER ARCHITECTURE FOR COMBINATION TOUCH, HANDWRITING AND FINGERPRINT SENSOR - A separate control system may be configured for a combined sensor device. Alternatively, at least part of the control system may be included in another device, such as a processor of a mobile device. Software for handwriting, touch and fingerprint detection may be included in the control system. Low, medium and high resolution may be obtained with a single combined sensor device by scanning a subset of the sensels, or by aggregating lines or columns. Power consumption may be reduced by aggregating sensor pixels (or rows or columns) electrically using the controller, so that they perform as a low power small array until higher resolution with a larger array is needed. Power consumption may be reduced by turning off portions or all of the sensor device, turning off parts of the control system, and/or employing first-level screening at a reduced frame rate.04-19-2012
20120092279TOUCH SENSOR WITH FORCE-ACTUATED SWITCHED CAPACITOR - This disclosure provides apparatus, systems and methods of fabricating force-sensitive switches. In some implementations, an array of force-sensitive switches and local capacitors of a combined sensor device may be used to connect the local capacitor into associated projected capacitive touch (PCT) detection circuitry. In some implementations, each capacitor may be formed with a thin dielectric layer to achieve a high capacitance increase when the force-sensitive switch is closed, e.g., by the pressing of a stylus or finger. In some implementations, the same PCT detection circuitry can be used to detect changes in mutual capacitance when touched with a finger (touch mode) and changes in sensel capacitance when the force-sensitive switch is depressed (stylus or fingerprint mode).04-19-2012
20120092127MULTIFUNCTIONAL INPUT DEVICE FOR AUTHENTICATION AND SECURITY APPLICATIONS - This disclosure provides systems, methods and apparatus for a combined sensor device. In some implementations, the combined sensor device may enable a single touchscreen to perform additional functions such as handwriting input and fingerprint recognition. In some implementations, these multiple features allow increased security through user authentication, and allow better capture of handwriting and a more interactive approach to user interfaces. A handheld mobile device such as a cell phone with the combined sensor device can enable an array of applications, such as using the mobile device as a gateway for user authentication to enable transactions and physical access; using the handwriting input function for signature recognition and transmittal for transaction applications; and/or using the handwriting input feature to automatically capture notes and other documents of students in an academic setting or employees in a corporate setting.04-19-2012
20120090757FABRICATION OF TOUCH, HANDWRITING AND FINGERPRINT SENSOR - Fabrication methods for combined sensor devices include substantially transparent substrates and materials to increase the optical performance of underlying displays. A substantially transparent elastomeric material may be disposed between the substantially transparent substrates. Some fabrication processes utilize flexible substrates for at least a portion of the sensor device, and lend themselves to roll-to-roll processing for low cost.04-19-2012
20120088027ANALOG INTERFEROMETRIC MODULATOR DEVICE WITH ELECTROSTATIC ACTUATION AND RELEASE - Examples of methods of manufacturing a microelectromechanical system (MEMS) device can include forming a first reflective layer on a substrate, forming a sacrificial layer over the first reflective layer, removing a portion of the sacrificial layer to form an opening, and filling the opening with a dielectric material to form a post. Some methods further include forming a second reflective layer over the sacrificial layer, removing a portion of the second reflective layer and a portion of the post to form a hole, filling the hole with a conductive material to form an electrode, and removing the sacrificial layer.04-12-2012
20120086998DIFFUSION BARRIER LAYER FOR MEMS DEVICES - Described herein is the use of a diffusion barrier layer between metallic layers in MEMS devices. The diffusion barrier layer prevents mixing of the two metals, which can alter desired physical characteristics and complicate processing. In one example, the diffusion barrier layer may be used as part of a movable reflective structure in interferometric modulators.04-12-2012
20120085731METHOD OF FABRICATING MEMS DEVICES (SUCH AS IMod) COMPRISING USING A GAS PHASE ETCHANT TO REMOVE A LAYER - Improvements in an interferometric modulator that cavity defined by two walls.04-12-2012
20120081406INTEGRATED BACKLIT FRONTLIGHT FOR REFLECTIVE DISPLAY ELEMENTS - This disclosure provides systems, methods and apparatus, including reflective display elements that are illuminated using a light source that is situated behind the pixel elements. In one aspect, a back light guide is disposed behind the pixel elements and is configured to inject light through light-injection apertures between reflective pixel elements. The light travels through the light-injection apertures and into a front light guide. The front light guide comprises light turning features configured to turn the light propagating through the light-injection apertures so that the light is redirected onto the reflective pixel elements, thereby illuminating the reflective pixel elements.04-05-2012
20120081348METHOD FOR ELIMINATING ROW OR COLUMN ROUTING ON ARRAY PERIPHERY - The present disclosure provides systems, methods, and apparatus to facilitate edge routing among a plurality of microelectromechanical devices arranged in a mosaic or array. In one aspect, the disclosed implementations modify the construction of a movable layer, such that portions of the movable layer, in addition to serving their original functions, also facilitate routing from a single edge of the device. In some implementations, portions of the movable layer are re-oriented to achieve edge routing, while in others, the orientation remains the same but electrical connections are altered.04-05-2012
20120075313INTERFEROMETRIC OPTICAL DISPLAY SYSTEM WITH BROADBAND CHARACTERISTICS - Broad band white color can be achieved in MEMS display devices by incorporating a material having an extinction coefficient (k) below a threshold value for wavelength of light within an operative optical range of the interferometric modulator. One embodiment provides a method of making the MEMS display device comprising depositing said material over at least a portion of a transparent substrate, depositing a dielectric layer over the layer of material, forming a sacrificial layer over the dielectric, depositing an electrically conductive layer on the sacrificial layer, and forming a cavity by removing at least a portion of the sacrificial layer. The suitable material may comprise germanium, germanium alloy of various compositions, doped germanium or doped germanium-containing alloys, and may be deposited over the transparent substrate, incorporated within the transparent substrate or the dielectric layer.03-29-2012
20120075269INTERFEROMETRIC OPTICAL MODULATOR WITH BROADBAND REFLECTION CHARACTERISTICS - An optical device suitable for forming a pixel in a video display. The optical device includes a first layer having a first refractive index; a second layer over the first layer, the second layer having a second refractive index less than the first refractive index; and a third layer over the second layer, the third layer having a third refractive index larger than the second refractive index; and a fourth layer that is at least partially optically absorptive, wherein the optical stack and the fourth layer are a first distance from one another when the device is in a first state and are a second distance from one another when the device is in a second state, the first distance different from the second distance.03-29-2012
20120075216INTEGRATED PASSIVES AND POWER AMPLIFIER - This disclosure provides systems, methods and apparatus for combining devices deposited on a first substrate, with integrated circuits formed on a second substrate such as a semiconducting substrate or a glass substrate. The first substrate may be a glass substrate. The first substrate may include conductive vias. A power combiner circuit may be deposited on a first side of the first substrate. The power combiner circuit may include passive devices deposited on at least the first side of the first substrate. The integrated circuit may include a power amplifier circuit disposed on and configured for electrical connection with the power combiner circuit, to form a power amplification system. The conductive vias may include thermal vias configured for conducting heat from the power amplification system and/or interconnect vias configured for electrical connection between the power amplification system and a conductor on a second side of the first substrate.03-29-2012
20120069232CURVILINEAR CAMERA LENS AS MONITOR COVER PLATE - Disclosed are various implementations of a camera lens that can be positioned between a display device and a user viewing the display device. The camera lens can be transparent to allow such viewing by the user, and also be configured to capture light rays from the user and turn such rays to an imaging sensor to form an image of the user. Such turning of light rays can be achieved by curved features formed on the camera lens. In some implementations, the camera lens is a substantially flat layer having such curved features. Various examples of the curved features are disclosed. Also disclosed are systems and methods for enhancing the image of the user in situations where a portion of a display being viewed is captured by the camera lens and combines with the image of the user.03-22-2012
20120069031DECOUPLED HOLOGRAPHIC FILM AND DIFFUSER - In various embodiments described herein, a display device includes a front illumination device that comprises a light guide disposed forward of an array of display elements, such as an array of interferometric modulators, to distribute light across the array of display elements. The light guide may include a turning film to deliver uniform illumination from a light source to the array of display elements. For many portable display applications, the light guide comprises the substrate used in fabricating the display elements. The display device may include additional films as well. The light guide, for example, may include a diffuser and/or an optical isolation layer to further enhance the optical characteristics of the display.03-22-2012
20120062615SYSTEM AND METHOD OF UPDATING DRIVE SCHEME VOLTAGES - This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for calibrating display arrays. In one aspect, a method of calibrating a display array includes determining a particular drive response characteristic and updating a particular drive scheme voltage between updates of image data on the display array.03-15-2012
20120062575METHODS AND DEVICES FOR LIGHTING DISPLAYS - Various devices and methods of lighting a display are disclosed. In one embodiment, for example, a display device includes a transmissive display configured to be illuminated through a back surface and a reflective display configured to be illuminated through a front surface. A light source is disposed with respect to the back of the transmissive display to illuminate the transmissive display through the back surface. A light pipe is disposed with respect to the light source to receive light from the light source and is configured to propagate the light such that this light provides front illumination of the reflective display.03-15-2012
20120062572METHOD AND APPARATUS FOR PROVIDING BRIGHTNESS CONTROL IN AN INTERFEROMETRIC MODULATOR (IMOD) DISPLAY - Methods and systems for providing brightness control in an interferometric modulator (IMOD) display are provided. In one embodiment, an interferometric modulator display pixel is provided that includes a microelectromechanical systems (MEMS) interferometric modulator having an associated first color spectrum, and a color absorber located substantially in front of the interferometric modulator display pixel, in which the color absorber has an associated second color spectrum. The micro electromechanical systems (MEMS) interferometric modulator is operable to shift the first color spectrum relative to the second color spectrum to control a visual brightness of the interferometric modulator display pixel independent of a color of the interferometric modulator display pixel.03-15-2012
20120062570PROCESS OF FORMING AN AIR GAP IN A MICROELECTROMECHANICAL SYSTEM DEVICE USING A LINER MATERIAL - This disclosure provides systems, methods and apparatus for forming an air gap in an EMS device without using a sacrificial layer in the air gap. In some implementations, a support structure is formed on the substrate, and a sacrificial substrate is provided on the support structure. A liner material is deposited on the substrate, the support structure, and the sacrificial substrate, for instance, via an atomic layer deposition (ALD) process. The sacrificial substrate can be removed, and a top layer material can be deposited on the exposed areas of the support structure and the liner material. The liner material defines an air gap between the substrate and the top layer material.03-15-2012
20120062310SYSTEM AND METHOD FOR CHARGE CONTROL IN A MEMS DEVICE - An electromechanical device is disclosed. The device includes a variable capacitor, and a switch circuit configured to pre-charge an input node with a pulse charge at said selected voltage level. The switch circuit includes only a first switch coupled to the variable capacitor and the first switch is configured to respond to an enable signal having a duration shorter than a mechanical time constant of the variable capacitor and the first switch is configured to apply the selected voltage level across the variable capacitor to cause the pulse charge to accumulate on the variable capacitor.03-15-2012
20120057216MULTICOMPONENT SACRIFICIAL STRUCTURE - A MEMS comprising a sacrificial structure, which comprises a faster etching portion and a slower etching portion, exhibits reduced damage to structural features when in forming a cavity in the MEMS by etching away the sacrificial structure. The differential etching rates mechanically decouple structural layers, thereby reducing stresses in the device during the etching process. Methods and systems are also provided.03-08-2012
20120056890FLEXIBLE FILM INTERFEROMETRIC MODULATOR DEVICES AND METHODS OF FORMING THE SAME - The present disclosure provides systems, methods and apparatus for providing interferometric modulator displays using flexible films. In one aspect, a method of forming an interferometric modulator device includes providing a conductive element, depositing a reflective layer over at least a portion of the conductive element, and depositing a plurality of spacing elements over the conductive element. The absorber layer and the substrate are provided over the conductive element such that the absorber layer is disposed between the substrate and the spacing elements.03-08-2012
20120056867SYSTEM AND METHOD OF LEAKAGE CURRENT COMPENSATION WHEN SENSING STATES OF DISPLAY ELEMENTS - This disclosure provides systems, methods and apparatus for calibrating display arrays. A leakage compensation circuit is provided in conjunction with a circuit for sensing display element states. The leakage compensation circuit may include a leakage current integrator and a voltage to current converter.03-08-2012
20120056855INTERFEROMETRIC DISPLAY DEVICE - This disclosure provides systems, methods, and apparatus including one or more capacitance control layers to decrease the magnitude of an electric field between a movable layer and an electrode. In one aspect, a display device includes an electrode, a movable layer, and a capacitance control layer. At least a portion of the movable layer can be configured to move toward the electrode when a voltage is applied across the electrode and the movable layer and an interferometric cavity can be disposed between the movable layer and the first electrode. The capacitance control layer can be configured to decrease the magnitude of an electric field between the movable layer and the electrode when the voltage is applied across the movable layer and the electrode.03-08-2012
20120044563REDUCED CAPACITANCE DISPLAY ELEMENT - A display element, such as an interferometric modulator, includes a transparent conductor configured as a first electrode and a movable minor configured as a second electrode. Advantageously, the partial reflector is positioned between the transparent conductor and the movable mirror. Because the transparent conductor serves as an electrode, the partial reflector does not need to be conductive. Accordingly, a greater range of materials may be used for the partial reflector. In addition, a transparent insulative material, such as a dielectric, may be positioned between the transparent conductor and the partial reflector, for example, in order to decrease a capacitance of the display element without changing a gap distance between the partial reflector and the movable minor. Thus, a capacitance of the display element may be reduced without changing the optical characteristics of the display element.02-23-2012
20120044562ACTUATION AND CALIBRATION OF CHARGE NEUTRAL ELECTRODE - This disclosure provides systems, methods, and devices for actuating, charging and calibrating the charge on a movable electrode in electronic devices. The electronic device can include a first electrode, a second electrode spaced apart from the first electrode by a gap, at least one electrical contact, and an electrically neutral movable third electrode disposed between the first electrode and the second electrode. The third electrode can be charged by applying a charging actuation voltage across the first electrode and the second electrode to produce an electric field in the gap. Under the electric field, the electrically neutral third electrode can move towards the first electrode from a first position to a second position where it connects with the electrical contact. Once in contact with the electrical contact, an electric charge on the third electrode can be changed when the third electrode is in the second position. When a mechanical restorative force on the third electrode exceeds the force of the electric field on the third electrode, the third electrode moves to a third position.02-23-2012
20120044237ACTUATION AND CALIBRATION OF CHARGE NEUTRAL ELECTRODE - This disclosure provides systems, methods, and devices for actuating, charging and calibrating the charge on a movable electrode in electromechanical systems (EMS) devices. The electromechanical systems device can include a first electrode, a second electrode spaced apart from the first electrode by a gap, a complementary electrode, at least one electrical contact, and a movable third electrode disposed between the first electrode and the second electrode. In one implementation, a method of calibrating charge on the movable electrode of the EMS device includes electrically connecting a complementary electrode to the first electrode to form a compound electrode and applying a calibration voltage across the compound electrode and the second electrode to produce a uniform electric field in the gap. Under the electric field the third electrode moves towards the first electrode until it connects with the at least one electrical contact. Once in contact with the electrical contact, an electrical charge on the third electrode can be changed and calibrated when the third electrode is in a second position. When a mechanical restorative force on the third electrode exceeds the electric force of the uniform electric field on the third electrode, the third electrode then moves to a third position.02-23-2012
20120042931INTERFEROMETRIC MASKS - An interferometric mask covering the front electrodes of a photovoltaic device is disclosed. Such an interferometric mask may reduce reflections of incident light from the electrodes. In various embodiments, the mask reduces reflections so that a front electrode pattern appears similar in color to adjacent regions of visible photovoltaic active material.02-23-2012
20120038653DEVICE HAVING A CONDUCTIVE LIGHT ABSORBING MASK AND METHOD FOR FABRICATING SAME - A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device includes a substrate, a plurality of optical elements on the substrate, each optical element having an optical characteristic which changes in response to a voltage applied to the optical element, and a light-absorbing, electrically-conductive optical mask disposed on the substrate and offset from the plurality of optical elements, the optical mask electrically coupled to one or more of the optical elements to provide electrical paths for applying voltages to the optical elements. In another embodiment, a method of providing an electrical signal to optical elements of a display comprises electrically coupling an electrically-conductive light-absorbing mask to one or more optical elements, and applying a voltage to the mask to activate the one or more optical elements.02-16-2012
20120037790ADJUSTABLY TRANSMISSIVE MEMS-BASED DEVICES - Modulator devices are selectably adjustable between at least two states, wherein the transmission and/or reflection of particular wavelengths of light are modified. Certain modulator devices are substantially uniformly adjustable over a wide range of wavelengths, including visible and infrared wavelengths. Other modulator devices are adjustable over visible wavelengths without significantly affecting infrared wavelengths. In addition, the modulator devices may be used in conjunction with fixed thin film reflective structures.02-16-2012
20120032692MEMS GAS SENSOR - Systems and methods for sensing a chemical or gas species of interest are provided. In one aspect, a method of sensing a chemical includes determining a capacitance change between at least two layers in a MEMS device, the capacitance between the at least two layers indicative of a presence of one or more chemicals; and identifying the presence of the one or more chemicals based on a determined electrical response of the at least two layers and the determined capacitance change.02-09-2012
20120026576DEVICES AND METHODS FOR ENHANCING BRIGHTNESS OF DISPLAYS USING ANGLE CONVERSION LAYERS - Various embodiments of the present invention relate to enhancing the brightness of displays that employ illumination systems. In some embodiments, the illumination systems include light guides, diffractive microstructure, and light-turning features. The diffractive microstructure may be configured to receive ambient light at a first angle and produce diffracted light at a second angle greater than the first angle and greater than the critical angle for of light guide. The light is thereby guided within the light guide. The light-turning features may be configured to turn the light guided within the light guide out of a light guide and onto, for example, a spatial light modulator at near normal incidence.02-02-2012
20120026176INTERFEROMETRIC MODULATOR WITH DIELECTRIC LAYER - By selectively placing color filters with different transmittance spectrums on an array of modulator elements each having the same reflectance spectrum, a resultant reflectance spectrum for each modulator element and it's respective color filter is created. In one embodiment, the modulator elements in an array are manufactured by the same process so that each modulator element has a reflectance spectrum that includes multiple reflectivity lines. Color filters corresponding to multiple colors, such as red, green, and blue, for example, may be selectively associated with these modulator elements in order to filter out a desired wavelength range for each modulator element and provide a multiple color array. Because the modulator elements are manufactured by the same process, each of the modulator elements is substantially the same and common voltage levels may be used to activate and deactivate selected modulation.02-02-2012
20120019894Interferometric modulation devices having triangular subpixels - At least some subpixels in an interferometric modulator display are formed in a triangular shape. Such triangular subpixels may be formed and/or addressed in a variety of manners. At least some individual triangular subpixels may be separately addressable. However, a plurality of triangular subpixels may be addressable as a group, e.g., as a group of 2, 3, 4 or more. A single pixel may include varying numbers of triangular subpixels. For example, a single pixel may include 3, 6, 9, 12, 15, 18, 21 or some other number of triangular subpixels. Alternatively, a single pixel may include 4, 8, 12, 16, 20, or some other number of triangular subpixels. A single pixel may include triangular subpixels that are configured to be separately addressable and/or triangular subpixels are configured to be addressable as a group.01-26-2012
20120019713MEMS-BASED APERTURE AND SHUTTER - Some embodiments comprise at least one array that includes microelectromechanical systems (“MEMS”)-based light-modulating devices. Elements of the array(s) may be configured to absorb and/or reflect light when in a first configuration and to transmit light when in a second position. Such an array may be controlled to function as a camera aperture and/or as a camera shutter. For example, a controller may cause the array to function as a shutter by causing the MEMS devices to open for a predetermined period of time. The predetermined period of time may be based, at least in part, on input received from a user, the intensity of ambient light, the intensity of a flash, the size of the camera aperture, etc. Some embodiments provide a variable aperture device that does not add significant thickness or cost to a camera module. Such embodiments may enable a camera to function well in both bright and dark light, to control depth of field, etc.01-26-2012
20120014683CAMERA FLASH SYSTEM CONTROLLED VIA MEMS ARRAY - A camera flash system may include a light source and an array that includes MEMS-based light-modulating devices disposed in front the light source. The camera flash system may control the array to transmit light through, or substantially prevent the transmission of light through, predetermined areas of the array. In some embodiments, the array may be controlled in response to input from a user, in response to detected ambient light conditions and/or in response to the proximity of a detected subject or other detected features. For example, the camera flash system may control the array to substantially prevent the transmission of light through an area of the array that is between the light source and the eyes of a detected subject.01-19-2012
20120002266METHOD AND DEVICE FOR PACKAGING A SUBSTRATE - A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the interferometric modulator. A gap or cavity between the interferometric modulator and the thin film provides a space in which mechanical parts of the interferometric modulator may move. The gap is created by removal of a sacrificial layer that is deposited over the interferometric modulator.01-05-2012

Patent applications by QUALCOMM MEMS Technologies, Inc.