PRECITEC OPTRONIC GMBH
Rodgau, DE
PRECITEC OPTRONIC GMBH Patent applications | ||
Patent application number | Title | Published |
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20130034918 | MONITORING APPARATUS AND METHOD FOR IN-SITU MEASUREMENT OF WAFER THICKNESSES FOR MONITORING THE THINNING OF SEMICONDUCTOR WAFERS AND THINNING APPARATUS COMPRISING A WET ETCHING APPARATUS AND A MONITORING APPARATUS - According to the invention, a monitoring device ( | 02-07-2013 |