| 20100012620 | WET-PROCESSING APPARATUS AND METHOD OF FABRICATING DISPLAY PANEL - The wet-processing apparatus includes a wet-step bath in which a wet-step is carried out, and a vibration-type film separator for separating impurities out of a solution used in the wet-step. The wet-processing apparatus further includes a re-supply path through which the solution out of which the impurities were removed by means of the vibration-type film separator is re-supplied to the wet-step bath. Thus, it is possible to reuse a solution and a material of which a pattern is composed. Since the vibration-type film separator is used, it is possible to reduce a frequency of exchanging filters equipped in the vibration-type film separator, and ensure a high rate at which a material of which a pattern is composed is recovered, regardless of a specific gravity of the material. | 01-21-2010 |
