Persimmon Technologies, Corp. Patent applications |
Patent application number | Title | Published |
20160064263 | Low Variability Robot - An apparatus including a frame, a first position sensor, a drive and a chamber. The frame has at least three members including at least two links forming a movable arm and an end effector. The end effector and the links are connected by movable joints. The end effector is configured to support a substrate thereon. The first position sensor is on the frame proximate a first one of the joints. The first position sensor is configured to sense a position of two of the members relative to each other. The drive is connected to the frame. The drive is configured to move the movable arm. The frame is located in the chamber, and the drive extends through a wall in the chamber. | 03-03-2016 |
20160043602 | Structures Utilizing a Structured Magnetic Material and Methods for Making - A motor comprises a stator comprising at least one core; a coil wound on the at least one core of the stator; a rotor having a rotor pole and being rotatably mounted relative to the stator; and at least one magnet disposed between the rotor and the stator. The at least one core comprises a composite material defined by iron-containing particles having an alumina layer disposed thereon. | 02-11-2016 |
20150314459 | Two-Link Arm Trajectory - Providing a first movement including rotating a first arm about a rotational axis of a robot drive; rotating a second arm on the first arm, where the first and second arms form a robot arm, where the first and second arms are the only arms of the robot arm, where the robot arm has an end effector rotationally fixed to the second arm, and where the end effector is configured to support a substrate thereon for transporting the substrate by the robot arm; and controlling the rotating to provide a path of the end effector such that the end effector does not contact the substrate during the rotating. Providing a second movement including rotating the arms to provide an at least partially straight linear path of a center of the substrate relative to the rotational axis of the drive robot when the substrate is on the end effector. | 11-05-2015 |
20150303764 | Robot Having Isolated Stator and Encoder - An apparatus including a housing; a motor having a stator and a rotor, where the stator is connected to the housing; an environment barrier extending between the stator and the rotor; and a sealing system connecting the environment barrier with the housing. The sealing system includes a first seal interface and a second seal interface. The first seal interface connects to the housing at a first diameter which is at least partially less than or equal to an inner diameter of the stator. The second seal interface connects to the housing at a second diameter which is at least partially greater than or equal to an outer diameter of the stator. | 10-22-2015 |
20150145357 | Robot Drive With Radially Adjustable Sensor Connection - A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber. | 05-28-2015 |
20140365011 | Robot and Adaptive Placement System and Method - A method including moving a substrate, located on a first end effector of a robot, from a first location towards a second location by the robot; determining location of a fiducial on the substrate while the substrate is being moved from the first location towards the second location; comparing the determined location of the fiducial with a reference fiducial location while the robot is moving the substrate from the first location towards the second location. | 12-11-2014 |
20140365005 | Robot and Adaptive Placement System and Method - An apparatus including at least one processor; and at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus to: determine locations of at least two substrates on respective end effectors of the apparatus while the substrates are being moved by the end effectors in substantial unison towards respective target locations for the substrates; and while the end effectors are being moved towards the respective target locations, and based upon the determined locations of the substrates, adjust a position of at least a first one of the end effectors on the apparatus relative to a second one of the end effectors, where the position of the first end effector is adjusted relative to the second end effector while the apparatus is moving the substrates in substantial unison towards the respective target locations and prior to reaching the target locations. | 12-11-2014 |
20140365004 | Robot and Adaptive Placement System and Method - An apparatus including a drive; a movable arm assembly; a plurality of sets of end effectors; and a controller. The end effectors are connected to the drive by the movable arm assembly. A first one of the sets of end effectors includes at least two of the end effectors, where the drive and the movable arm assembly are configured to move the at least two end effectors substantially in unison from a retracted position towards an extended position towards two different respective target locations. The at least two end effectors are at least partially independently movable relative to each other on the moveable arm assembly. The controller is configured to detect an offset of respective substrates on the at least two end effectors and adjust movement of the at least two end effectors relative to each other prior to placement of the substrates at the respective target locations. | 12-11-2014 |
20140205416 | Robot Having Arm with Unequal Link Lengths - A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted. | 07-24-2014 |
20140139162 | Robot Having Repeatable Disturbance Compensation Algorithm - A controller for a substrate transport apparatus. The controller includes a first system and a second system for at least partially controlling a movement of a motor of the substrate transport apparatus. The first system is configured to control the movement of the motor based upon a signal from a position sensor. The position sensor outputs the signal based upon a position of a rotor of the motor relative to a stator of the motor. Torque output of the motor is at least partially controlled based upon the signal from the position sensor. The second system for at least partially controlling the movement of the motor is based upon expected disturbances during movement of an arm of the substrate transport apparatus by the motor, where the second system is configured to at least partially increase and/or decrease the torque output of the motor by first system. | 05-22-2014 |
20140137690 | Robot Having High Stiffness Coupling - A substrate transport arm including a plurality of links rotatably connected to each other in series; and a system for maintaining radial orientation of a third one of the links regardless of a rotational angle of first and second ones of the links relative to each other. The system for maintaining radial orientation includes a four-bar linkage. | 05-22-2014 |
20140103752 | Hybrid Motor - A multi-phase motor including a rotor and a stator including at least one core. The stator includes a plurality of phase sections. Each phase section is configured to provide a phase of the multi-phase motor. Each phase section includes at least one of the core(s), at least two ring magnets having polarity facing in a substantially same direction, and a winding between the at least two ring magnets. The winding is configured to be energized to direct flux through the at least one core at a first portion associated with a first one of the ring magnets, and to be differently energized to direct flux through the at least one core at a second portion associated with a second one of the ring magnets. | 04-17-2014 |
20140077637 | Robot Drive With Passive Rotor - A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber. | 03-20-2014 |
20140077629 | Robot Drive With Passive Rotor - A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber. | 03-20-2014 |
20130071218 | Low Variability Robot - An apparatus including a frame, a first position sensor, a drive and a chamber. The frame has at least three members including at least two links forming a movable arm and an end effector. The end effector and the links are connected by movable joints. The end effector is configured to support a substrate thereon. The first position sensor is on the frame proximate a first one of the joints. The first position sensor is configured to sense a position of two of the members relative to each other. The drive is connected to the frame. The drive is configured to move the movable arm. The frame is located in the chamber, and the drive extends through a wall in the chamber. | 03-21-2013 |
20130069450 | Robot Drive With Passive Rotor - A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber. | 03-21-2013 |