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OERLIKON LEYBOLD VACUUM GMBH

OERLIKON LEYBOLD VACUUM GMBH Patent applications
Patent application numberTitlePublished
20120087776MULTI-INLET VACUUM PUMP - A multi-inlet vacuum pump has a first pump device (04-12-2012
20120063917ROUGHING PUMP METHOD FOR A POSITIVE DISPLACEMENT PUMP - In order to provide a simple and energy-efficient rough pumping method for a displacement pump (03-15-2012
20110311348MULTI-INLET VACUUM PUMP - A multi-inlet vacuum pump includes a first pump device (12-22-2011
20110255999USE OF A ROLLING-ELEMENT BEARING FOR BEARING ROTATING COMPONENTS IN VACUUM DEVICES AND VACUUM DEVICE - A rolling-element bearing for bearing rotating components in vacuum devices includes a plurality of rolling elements (10-20-2011
20110232689METHOD FOR CLEANING A VACUUM PUMP - A method for cleaning a vacuum pump (09-29-2011
20110197659METHOD FOR DETERMINING AN OVERALL LEAKAGE RATE OF A VACUUM SYSTEM AND VACUUM SYSTEM - An overall leakage rate of a vacuum system which can be operated continuously or cyclically is determined. The vacuum system includes at least one process chamber (08-18-2011
20110150629STATOR-ROTOR ARRANGEMENT FOR A VACUUM PUMP AND VACUUM PUMP - A stator-rotor arrangement for a vacuum pump, in particular for a turbomolecular pump, includes a plurality of stator disks (06-23-2011
20110129374VACUUM PUMP IN PARTICULAR ROOTS TYPE PUMP - A vacuum pump, in particular a pump of the type with rolling bodies, includes rotary bodies (06-02-2011
20110123358VACUUM PUMP - A vacuum pump, in particular a turbomolecular pump or a multi-inlet pump, includes a rotor shaft (05-26-2011
20110123328VACUUM PUMP - A vacuum pump, particularly a turbomolecular pump or multi-inlet pump, comprises a rotor shaft (05-26-2011
20110081231PUMP BEARING ARRANGEMENT - A pump bearing arrangement, suitable particularly for rapidly rotating pumps such as turbomolecular pumps, comprises a pump rotor (04-07-2011
20110046897METHOD FOR DETERMINING THE FATIGUE OF A PUMP ROTOR OF A GAS TURBOPUMP - A method for determining the fatigue of the pump rotor of a gas turbopump comprises the following method steps: 02-24-2011
20100322798RAPIDLY ROTATING VACUUM PUMP - A rapidly rotating vacuum pump includes: a magnet-mounted rotor driven by an electric drive motor with a predetermined constant nominal rotational frequency (f12-23-2010
20100303653TURBOMOLECULAR PUMP - A turbomolecular pump (12-02-2010
20100303650CURRENT LEADTHROUGH FOR A VACUUM PUMP - The vacuum pump comprises a casing (12-02-2010
20100290915MULTI-STAGE PUMP ROTOR FOR A TURBOMOLECULAR PUMP - A multi-stage pump rotor (11-18-2010
20100260594VACUUM LINE - A vacuum line (10-14-2010
20100202880COATING FOR GAS BEARING - The invention relates to a vacuum pump in which the gas bearing is coated with a hard layer, and to a process for preparing such gas bearing of a vacuum pump.08-12-2010
20100199495PROCESS FOR PREPARING ROTORS OR STATORS OF A TURBOMOLECULAR PUMP - The invention relates to a process for preparing rotors or stators of a turbomolecular pump with rotor blades made of a specific aluminum alloy.08-12-2010
20100196180VACUUM PUMP - A vacuum pump (08-05-2010
20100187415TURBOMOLECULAR PUMP - A turbomolecular pump (07-29-2010
20100176294MASS SPECTROMETER ARRANGEMENT - The invention refers to a mass spectrometer arrangement (07-15-2010
20100086883METHOD FOR REACTING SELF-IGNITING DUSTS IN A VACUUM PUMP DEVICE - Into a vacuum pump device arranged for suctional intake of a process gas (04-08-2010
20100072845METHOD FOR DETERMINATION OF RESONANT FREQUENCIES OF A ROTOR USING MAGNETIC BEARINGS - The resonant frequencies of a rotor supported on magnetic bearings, in particular a rotor of a turbomolecular vacuum pump, are determined. While the rotor is stationary or the rotor is rotating at a relatively low rotation frequency, mechanical oscillations of the rotor are generated by electromagnets in the magnetic bearing. The rotor oscillations are detected by rotor-position sensors in the magnetic bearing. The resonant frequencies of the rotor are determined from the detected rotor-position oscillations.03-25-2010
20100054957METHOD FOR DETERMINING A STATEMENT OF A STATE OF A TURBOMOLECULAR PUMP AND A TURBOMOLECULAR PUMP - In a method for determining a statement of a state of a turbomolecular pump, and in a turbomolecular pump, a vibration curve is determined with a vibration sensor (03-04-2010
20100047095VACUUM PUMP - A vacuum pump (02-25-2010
20090068451COATED ARTICLES - The invention relates to a process for the coating of objects made of valve metals selected from aluminum, magnesium, titanium, niobium and/or zirconium and their alloys with an oxide ceramic layer formed from the metal which has a thin barrier layer as a boundary layer towards the metal whose surface has been coated with polymers, characterized in that said polymers are introduced into the capillary system of the oxide ceramic layer in the form of dimers or halogenated dimers of general formula I03-12-2009

Patent applications by OERLIKON LEYBOLD VACUUM GMBH