| 20090166188 | METHOD FOR DEPOSITING ELECTRICALLY INSULATING LAYERS - Method for producing low-conductivity layers, especially insulating layers, on at least one workpiece by vacuum coating, wherein an electrical arc discharge is operated between at least one anode and one cathode of an arc source in an atmosphere containing reactive gas, and only a small external magnetic field essentially perpendicular to the target surface or none at all is generated at the surface of a target electrically connected to the cathode to assist the evaporation process, the degree of recoating of the surface by other coating sources being less than 10%, and the magnetic field being generated by a magnet system that comprises at least one axially polarized coil with a geometry similar in size to the target. | 07-02-2009 |
