OCI Materials Co., Ltd. Patent applications |
Patent application number | Title | Published |
20150175418 | APPARATUS FOR PREPARING GERMANE GAS AND METHOD FOR PREPARING MONOGERMANE GAS USING SAME - The present disclosure relates to an apparatus for preparing germane gas and a method for preparing monogermane gas using same. More particularly, the present disclosure relates to an apparatus for preparing germane gas, capable of stably producing a large amount of monogermane gas by mixing starting materials in short time and removing reaction heat at the same time using a reactor having a microstructured channel, and a method for preparing monogermane gas using same. In accordance with the present disclosure, it is easy to control rapid increase of reaction temperature and pressure during mass production of germane gas. Accordingly, monogermane gas can be produced in large scale with high yield. | 06-25-2015 |
20150078980 | METHOD AND APPARATUS FOR PRODUCING DISILANE THROUGH PYROLYSIS OF MONOSILANE - An apparatus for producing disilane through pyrolysis of monosilane, includes: a monosilane pyrolysis unit; a solid particle removal unit which removes solid particles generated in the pyrolysis unit; a condensing unit which liquefies and collects unreacted monosilane, and disilane and higher silanes with three (3) to seven (7) silicon atoms as pyrolysis products excluding hydrogen from a gas with the solid particles removed; a first separation unit which separates monosilane from a mixture of the liquefied unreacted monosilane, disilane and higher silanes; and a second separation unit which separates disilane and higher silanes from the mixture with the monosilane removed. In accordance with the present disclosure, disilane can be produced economically and efficiently with high purity through pyrolysis of monosilane. | 03-19-2015 |