| 20090072147 | Detector Arrangement for Electromagnetic Radiation and Method for Measuring Electromagnetic Radiation - A detector arrangement for electromagnetic radiation has at least an absorbing element and a cantilever sensor which are in operational connection with each other, so that the sensor is bendable in response to electromagnetic radiation absorbed by the absorbing element. The arrangement further includes an interferometer for measuring bending of the cantilever sensor. In a method for measuring electromagnetic radiation, electromagnetic radiation is directed on to the absorbing element and thereby bending of the cantilever sensor is caused. Bending of the cantilever sensor is measured with an interferometer. The cantilever sensor can be a door-like flap made of silicon, attached to one side of a frame of silicon. | 03-19-2009 |
