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NORTHEASTERN
| NORTHEASTERN Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100001355 | RF MEMS Switch - An RF MEMS switch having a beam composed of a material having a high resistivity and a large Young's modulus may provide a large restoring force, a large electrostatic force at a low actuation voltage, and good isolation between signal input and output. RF MEMS switch reliability may be improved by reducing failures due to stiction by providing a large restoring force. A reliable contact may be provided with a large electrostatic force. | 01-07-2010 |