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NITTO DENKKO CORPORATION
| NITTO DENKKO CORPORATION Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100319151 | CLEANING SHEET, CONVEYING MEMBER USING THE SAME, AND SUBSTRATE PROCESSING EQUIPMENT CLEANING METHOD USING THEM - A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm | 12-23-2010 |