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Nissin Electric Co., Ltd. and EMD Corporation
| Nissin Electric Co., Ltd. and EMD Corporation Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100189921 | PLASMA GENERATING METHOD, PLASMA GENERATING APPARATUS, AND PLASMA PROCESSING APPARATUS - A plasma generating method and apparatus which use plural high-frequency antennas | 07-29-2010 |