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NIPPON ELECTRO-SENSORY DEVICES CORPORATION
| NIPPON ELECTRO-SENSORY DEVICES CORPORATION Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100165095 | DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD FOR SILICON WAFER - A defect inspection device for a silicon wafer comprises: an infrared light illumination which illuminates the silicon wafer with a light power that has been adjusted in accordance with a specific resistance value of the silicon wafer; and an imaging unit constituted by a line sensor array that is sensitive to infrared light, which captures the silicon wafer. | 07-01-2010 |