NIHON CERATEC CO., LTD. Patent applications |
Patent application number | Title | Published |
20120228998 | PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC ACTUATOR AND VIBRATION WAVE MOTOR INCLUDING PIEZOELECTRIC ELEMENT - Provided is a piezoelectric element including: an electrode portion including a piezoelectric layer and an electrode layer that are laminated; and a non-electrode portion that is in contact with the electrode portion and includes a piezoelectric layer without an electrode layer, in which the non-electrode portion includes a region having a density smaller than a density of the piezoelectric layer of the electrode portion. | 09-13-2012 |
20090142588 | Protective Film Structure of Metal Member, Metal Component Employing Protective Film Structure, and Equipment for Producing Semiconductor or Flat-Plate Display Employing Protective Film Structure - Multifunction production equipment enabling a plurality of processes in which deposition of reaction products on the inner wall of the processing chamber of equipment for producing a semiconductor or a flat-plate display, metal contamination due to corrosion of the inner wall, or the like, and fluctuation of the process due to discharged gas are suppressed, and a protective film structure for use therein. On the surface of a metal material, a first coating layer having an oxide coating of 1μ thick or less formed as an underlying layer by direct oxidation of a parent material, and a second coating layer of about 200 μm thick are formed. With such an arrangement, corrosion resistance against irradiation with ions or radicals can be imparted to a second layer protective film, and the effect of a protective layer for preventing corrosion of the surface of parent metal caused by diffusing molecules or ions into the second layer protective film can be imparted to the first layer oxide film. Consequently, contamination of the substrate with metals generated from each metal member and the inner surface of the process chamber is reduced, and stripping of the second layer protective film due to lowering in adhesion of the second layer protective film due to corrosion of the interface between the parent material and the second layer protective film can be suppressed. | 06-04-2009 |
20090133713 | Multilayer structural body and method for cleaning the same - It has been difficult to provide a large-sized ceramic member quickly and economically. A multilayer structure is produced by forming a ceramic film on a base which is made of a material that can be shaped comparatively easily. The ceramic film is formed by a plasma spraying method, CVD method, PVD method, sol-gel method or the like. Alternatively, the ceramic film may be formed by a method combined with a spray deposit film. | 05-28-2009 |
20090101070 | Member for a Plasma Processing Apparatus and Method of Manufacturing the Same - A member for a plasma processing apparatus, which is excellent in film-formability, durability, and reliability, is provided. | 04-23-2009 |