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MueTec Automatisierte Mikroskopie und Messtechnik GmbH
Muenchen, DE
| MueTec Automatisierte Mikroskopie und Messtechnik GmbH Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20090066970 | Arrangement and method for improving the measurement accuracy in the nm range for optical systems - A method and a device for improving the measurement accuracy in the nm range for optical systems are disclosed. The object is provided with a plurality of structures oriented in the X and Y-coordinate direction. The light beam coming from at least one light source defines an optical illumination path. | 03-12-2009 |