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METROALASER, INC.
| METROALASER, INC. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20110026033 | Optical Inspection Using Spatial Light Modulation - A Hartmann inspection system is provided that includes, comprising: a laser source; and a spatial light modulator (SLM) configured to form at least one aperture to form an object beam for inspecting an object, wherein the SLM is further configured to modulate the aperture with a diffraction grating. | 02-03-2011 |