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MEMSMART SEMICONDUCTOR CORP.
| MEMSMART SEMICONDUCTOR CORP. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100109121 | MICROELECTROMECHANICAL SYSTEM - A micro electromechanical system and a fabrication method thereof, which has trenches formed on a substrate to prevent circuits from interfering each other, and to prevent over-etching of the substrate when releasing a microstructure. | 05-06-2010 |