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MEMSCAP

MEMSCAP Patent applications
Patent application numberTitlePublished
20090147436AIR VARIABLE CAPACITOR COMPRISING AN INTERDIGITAL MOBILE COMB AND FIXED COMB, ACCELEROMETER AND GYROMETER COMPRISING SUCH A CAPACITOR - The invention relates to an air variable capacitor including a mobile comb and a fixed comb. Each of the combs include a body and teeth each having an end fixed to the body and free end. The teeth of the mobile and fixed combs being interdigital and an the air-gap of the capacitor is adjustable by the transverse movement of the teeth of the mobile comb. The teeth of the mobile comb have geometric differences between one another, in order to attenuate the transverse resonance modes of the mobile comb.06-11-2009
20090145227PENDULOUS ACCELEROMETER AND METHOD FOR THE MANUFACTURE THEREOF - The invention relates to a pendulous accelerometer including a pendulous electrode formed in a substrate, at least one counter electrode, and an encapsulation cover. The at least one counter electrode is formed under the cover, and spacers are positioned between the cover and the substrate.06-11-2009