MEMS-Vision International Inc.
MEMS-Vision International Inc. Patent applications | ||
Patent application number | Title | Published |
---|---|---|
20140125359 | METHODS AND SYSTEMS FOR HUMIDITY AND PRESSURE SENSOR OVERLAY INTEGRATION WITH ELECTRONICS - Capacitive sensors and MEMS elements that can be implemented directly above silicon CMOS electronics are disclosed. A capacitive based sensor is disposed over a first predetermined portion of a wafer that includes at least a first ceramic element providing protection for the final capacitive based sensor and self-aligned processing during its manufacturing. | 05-08-2014 |