| MEGA FLUID SYSTEMS, INC. Patent applications |
| Patent application number | Title | Published |
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| 20120111413 | System and Method for Delivering Chemicals - Systems and method for delivering materials to a tool are disclosed. A material delivery system utilizes two or more sources of the material to be delivered to the tool. One or more of the sources of the tool may be a batch mixer. The material delivery system also includes at least two material delivery recirculation lines providing material to at tool. The material delivery system may be manually or automatically controlled to switch supply of the material from one source to another, and/or to switch from one material delivery recirculation line to another. | 05-10-2012 |
| 20110153084 | Method and Apparatus for Blending Process Materials - A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer. | 06-23-2011 |
| 20100307602 | System and Method for Processing High Purity Materials - Systems and methods for processing high purity materials are disclosed. A unit operation processes a material stream, an operational parameter of the unit operation is monitored, and a standby unit is charged with pressurized gas to achieve system pressure. The material stream is diverted to the standby unit in response to the operational parameter of the unit operation registering a threshold value. Flow exiting the standby unit is first vented via an outlet, and then directed toward a point of use after the pressurized gas has been purged. The unit operation may then be serviced and subsequently brought back online. A second unit operation may process a second material stream simultaneously, and the second material stream may be periodically diverted to the standby unit in like manner, thus reducing line pressure variation. The disclosed method may be performed manually or implemented automatically through use of a controller. | 12-09-2010 |
| 20100265788 | METHOD AND APPARATUS FOR BLENDING PROCESS MATERIALS - An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank. | 10-21-2010 |
| 20100258196 | ARRANGEMENT OF MULTIPLE PUMPS FOR DELIVERY OF PROCESS MATERIALS - A method and apparatus for delivering process materials in a bulk delivery system includes a plurality of pumps arranged in series along a material supply line, wherein the capacity of each pump is such that less than all of the pumps operating simultaneously can provide a desired level of system performance for a given application. In at least one preferred embodiment, a plurality of pumps include three pumps are arranged in series. Preferred embodiments provide several benefits over a parallel arrangement of two larger pumps including, in the case of a single pump failure, that the remaining pumps are signaled to increase speed to restore system performance to restore supply line pressure with less perturbation than that realized in a two-pump, parallel arranged system. Methods are also provided herein for determining which of the three pumps is a failed pump in such a case. | 10-14-2010 |
