Max-Planck-Gesellschaft zur Foerderung der Wissens chaften e.V.
|Max-Planck-Gesellschaft zur Foerderung der Wissens chaften e.V. Patent applications|
|Patent application number||Title||Published|
|20130284690||PROCESS FOR PRODUCING HIGHLY ORDERED NANOPILLAR OR NANOHOLE STRUCTURES ON LARGE AREAS - The present invention relates to an improved process for producing highly ordered nanopillar or nanohole structures, in particular on large areas, which can be used as masters in NIL, hot embossing or injection molding processes. The process involves decorating a surface with an ordered array of metal nanoparticles produced by means of a micellar block- copolymer nano-lithography process; etching the primary substrate to a depth of 50 to 500 nm, where the nanoparticles act as a mask and an ordered array of nanopillars or nanocones corresponding to the positions of the nanoparticles is thus produced; using the nanostructured master or stamp in a structuring processes. Also the finished nanostructured substrate surface can be used as a sacrificial master which is coated with a continuous metal layer and the master is then etched away to leave a metal stamp having an ordered array of nanoholes which is a negative of the original array of nanopillars or nanocones.||10-31-2013|
|20120097859||SEMICONDUCTOR STRUCTURE, PARTICUALARLY BIB DETECTOR, HAVING A DEPFET AS A SENSOR DEVICE, AND CORRESPONDING OPERATING METHOD - The invention relates to an operating method for a semiconductor structure (||04-26-2012|
|20090078785||METHOD AND DEVICE FOR ATOMIZING A LIQUID - A method for atomizing at least one liquid (||03-26-2009|
|20090053472||STRUCTURING METHOD AND COMPONENT WITH A STRUCTURED SURFACE - A method for producing a structured surface (||02-26-2009|
Patent applications by Max-Planck-Gesellschaft zur Foerderung der Wissens chaften e.V.