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LOTUS SYSTEMS GMBH
| LOTUS SYSTEMS GMBH Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20110020096 | Batch processing system in an in-line facility - Methods and apparatuses for a batch processing system with in-line interfaces are provided to batch processing substrates in an in-line processing facility. In an embodiment, the batch processing system comprises carrier assembling and carrier disassembling stations interfacing the in-line path and the batch processing stations. | 01-27-2011 |