| 20100154614 | Method and device for vibration Assisted scribing process on a substrate - The present invention provides a vibration assistant scribing apparatus for generating an indentation having a median crack of a depth on a substrate and the method for the same. The provided vibration assistant scribing apparatus includes a clamping device clamping a scribing wheel for scribing the substrate; a moving pedestal having a pressure device configured thereon, the pressure device providing a pressure to the scribing wheel through the clamping device; and a vibration generator configured on the clamping device and providing a vibration force to the scribing wheel through the clamping device, so as to increase the depth of the median crack thereby. | 06-24-2010 |
