LEYBOLD OPTICS GMBH Patent applications |
Patent application number | Title | Published |
20160111313 | APPARATUS FOR THE VACUUM TREATMENT OF SUBSTRATES - The invention relates to an apparatus for the vacuum treatment of substrates ( | 04-21-2016 |
20150285957 | Hafnium or Zirconium Oxide Coating - The invention concerns an optical coating ( | 10-08-2015 |
20130316079 | Device and Process for Coating a Substrate - The invention relates to an apparatus ( | 11-28-2013 |
20130129329 | DEVICE FOR THERMALLY TREATING SUBSTRATES - The invention relates to a heat treatment inner chamber ( | 05-23-2013 |
20120180810 | CLEANING OF A PROCESS CHAMBER - A method for cleaning at least one component arranged in the inner region of a plasma process chamber using a cleaning gas including fluorine gas, where the process chamber has at least one electrode and counter-electrode for generating a plasma for plasma treatment, where the inner region is exposed to gaseous fluorine compounds with a partial pressure of greater than 5 mbar, where the process chamber has at least one electrode and counter-electrode for generating a plasma, and the fluorine gas is thermally activated by means of a temperature-regulating means, where the component to be cleaned has a temperature of<350° C. | 07-19-2012 |
20120171632 | DEVICE AND TREATMENT CHAMBER FOR THERMALLY TREATING SUBSTRATES - A treatment chamber for thermal processing of an areal substrate including a transport arrangement for conveying and supporting the substrate during the thermal processing and a gas-guiding arrangement for convective heating or cooling of the substrate, where the gas-guiding arrangement has outlet openings, by means of which the temperature-controlled gas is guided onto the substrate, and where a removal arrangement is provided, by means of which the gases introduced into the treatment chamber via the gas-guiding arrangement can be removed in a targeted fashion, such that the treatment chamber can be embodied as a heat-treatment chamber or as a cooling chamber. | 07-05-2012 |
20120097641 | METHOD AND DEVICE FOR PLASMA TREATMENT OF A FLAT SUBSTRATE - Method and device for the plasma treatment of a substrate in a plasma device, wherein—the substrate ( | 04-26-2012 |
20110265583 | TEST GLASS CHANGING SYSTEM - The invention relates to a test glass changing system ( | 11-03-2011 |
20110220382 | METHOD FOR PRODUCING A LAYER SYSTEM ON A SUBSTRATE AND LAYER SYSTEM - In the method for producing a layer system on a dielectric substrate in which a metal layer is applied onto the substrate by a coating step ( | 09-15-2011 |
20110068691 | METHOD FOR PRODUCING A PLASMA BEAM AND PLASMA SOURCE - A method for generating a plasma beam and a plasma source for carrying out the method, where the plasma beam is extracted from a plasma generated by electric and magnetic fields by means of a radiofrequency voltage being applied to an extraction electrode and an RF electrode device having an excitation electrode having an excitation area, where a plasma space is arranged between extraction electrode and excitation area and the plasma, relative to the extraction electrode, on average over time, is at a higher potential which accelerates positive plasma ions, and | 03-24-2011 |
20100279124 | Hafnium or zirconium oxide Coating - The invention concerns an optical coating ( | 11-04-2010 |
20100255196 | TREATMENT SYSTEM FOR FLAT SUBSTRATES - A reactor for the treatment of flat substrates includes a vacuum chamber with a process space arranged therein. A first electrode and a counterelectrode generate a plasma for the treatment of a surface to be treated and form two opposite walls of the process space. The reactor further includes means for introducing and means for removing gaseous material into and out from the process space. At least one substrate is accommodated by a front side of the counterelectrode. The vacuum chamber includes an opening having a closure device. The reactor includes a device for varying the relative distance between the first electrode and the counterelectrode and a device assigned to the counterelectrode for accommodating substrates. At least one substrate is arranged at an angle alpha in a range of between 0° and 90° relative to a perpendicular direction at least during the performance of the treatment. | 10-07-2010 |
20100215848 | VACUUM TREATMENT OF STRIP-SHAPED SUBSTRATES - In the case of the treatment installation for the vacuum treatment, in particular vacuum coating, of a front side of substrates in strip form in a first process chamber with a first process roller and at least one process source and a second process chamber with a second process roller and at least one process source, it is provided that there is a transfer chamber which is arranged between the first and second process chambers, is coupled with both process chambers and can be separated in terms of pressure from at least one of the process chambers and an unwinding device with a removable unwinding reel and a winding-up device with a removable winding-up reel for the substrate to be treated as well as an outside air lock for loading and unloading the unwinding reel and/or winding-up reel. During this, the substrate to be treated is facing with its rear side toward the first and second process rollers and can be guided through the transfer chamber from the unwinding device to the first process roller, from the first process roller to the second process roller and from the second process roller to the winding-up device. The invention also relates to a method for operating the treatment installation. | 08-26-2010 |
20090214760 | Optical Monitoring System for Coating Processes - The invention concerns an optical monitoring system for the measurement of layer thicknesses of thin coatings applied in a vacuum, particularly on moving substrates, during the coating process, in which the light intensity of the light of a light source injected into a reference light guide and released by a first piezoelectric or electrostrictive or magnetostrictive light chopper is registered by a light detector unit in a reference phase, the light of the light source in a measuring phase is injected into a first measuring light guide and the light released by a second piezoelectric or electrostrictive or magnetostrictive light chopper is directed to the substrate, and the light intensity of the light reflected or transmitted from the substrate is registered by the light detector unit through a second measuring light guide, and a remaining light intensity is registered by the light detector unit in at least one dark phase, wherein the reference phase, the measuring phase, and the dark phase are shifted in time by the light chopper and are digitally adjusted depending on the position of the substrate. | 08-27-2009 |
20090011127 | PROCESS AND APPARATUS FOR SUPERIMPOSING A LAYER OF A SEPARATING AGENT - During the process for applying a coating of separating agent to a moving or movable substrate in a vacuum chamber, wherein the separating agent is vaporized in the interior of a vaporizing chamber that contains at least one nozzle pointing towards the substrate, liquid separating agent is injected into the interior of the vaporizing chamber to be vaporized. The necessary apparatus for applying a coating of separating agent to a moving or movable substrate in a vacuum chamber, wherein the vacuum chamber contains at least one metal vaporizing apparatus with a vaporizing chamber that contains a nozzle pointing towards the substrate, wherein the separating agent can be supplied to the interior of the vaporizing chamber via a supply pipe, includes that the supply pipe is connected to an injection apparatus, via which the liquid separating agent is or can be injected into the interior of the vaporizing chamber in order to be vaporized. | 01-08-2009 |
20080318033 | Coated Substrate with a Temporary Protective Layer and Method for Production Thereof - The invention relates to a method for production of a coated substrate, whereby at least one functional layer is deposited on the substrate from the vapor phase by means of chemical or physical deposition of a coating material and a temporary protective layer is applied to the functional layer by means of evaporation of a salt, in particular, an alkali metal halide. The invention further relates to a coated substrate with at least one functional layer and a temporary protective layer applied to the functional layer, which comprises a salt, in particular, an alkali metal halide, preferably a salt-like alkali metal halide and more particularly sodium chloride. | 12-25-2008 |
20080285060 | Measuring System for Optical Monitoring of Coating Processes - The invention concerns a measuring system for optical monitoring of coating processes in a vacuum chamber, in which the light source is arranged inside the vacuum chamber between the substrate carrier and a shutter is arranged beneath the substrate carrier and the light-receiving unit is arranged outside the vacuum chamber in the optical path of the light source. The substrate carrier is designed to accept at least one substrate, and it can move across the coasting source in the vacuum chamber, preferably revolving about an axis, whereby the substrate or substrates cross(es) the optical path between the light source and the light-receiving unit for transmission measurement, and the shutter shades a measurement area across the coating source. | 11-20-2008 |
20080271501 | Locking Device - The invention relates to a locking device for a lock opening which is arranged in a wall between a first and a second recipient, said lock opening comprising a blocking element, which is arranged in the inner chamber of the first recipient, and a counter-plate which is associated with the blocking element. A first magnet device is provided in an area of the counter-plate and a second magnet device, which is associated with the first magnet device, is provided in the region of the blocking element. In order to close and/or open the locking device by means of the first and second magnet device, a positive and/or negative contact pressure can be produced between the blocking element and the counter-plate. | 11-06-2008 |
20080245300 | APPARATUS AND METHOD FOR CONTINUOUSLY COATING STRIP SUBSTRATES - A device and a method for coating of a sheet-like substrate that can be moved with respect to an evaporator bench in a running direction, whereby the evaporator bench has a number of heatable evaporator boats arranged directly adjacent to each other in the evaporator bench and their longitudinal axes enclose an angle with respect to the running direction, whose absolute value lies between 1° and 89°, and whereby the device has an arrangement for supplying wire of a material being evaporated to the evaporator boats, where the evaporator boats are arranged alternating next to each other, so that an evaporator boat, whose longitudinal axis is rotated counterclockwise with respect to the running direction is situated next to an evaporator boat, whose longitudinal axis is rotated clockwise with respect to the running direction. | 10-09-2008 |