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Lam Reseach Corporation
| Lam Reseach Corporation Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100252197 | SHOWERHEAD ELECTRODE WITH CENTERING FEATURE - A showerhead electrode includes inner and outer steps at an outer periphery thereof, the outer step cooperating with a clamp ring which mechanically attaches the electrode to a backing plate. | 10-07-2010 |