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KLA-Tencor MIE GmbH
| KLA-Tencor MIE GmbH Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20110225554 | Method for the Reproducible Determination of the Position of Structures on a Mask with a Pellicle Frame - A method for the reproducible determination of the positions of structures ( | 09-15-2011 |
| 20110205553 | Method for focusing an object plane and optical assembly - A method for focusing an object plane ( | 08-25-2011 |
| 20110090483 | Apparatus for the optical inspection of wafers - A metrology tool ( | 04-21-2011 |
| 20100302555 | Metrology system and method for monitoring and correcting system generated errors - A metrology system ( | 12-02-2010 |
| 20100295938 | Apparatus for the Optical Inspection of Wafers - An apparatus ( | 11-25-2010 |