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KIRIN TECHNO-SYSTEM COMPANY, LIMITED
| KIRIN TECHNO-SYSTEM COMPANY, LIMITED Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20090148031 | SURFACE INSPECTION APPARATUS - A surface inspection apparatus, which includes a detecting device of scanning a surface of an inspection object with an inspection light and outputting a signal corresponding to a light amount of refection light from the surface, generates a two-dimensional image of the surface of the inspection object on the basis of the output signal of the detecting device (S | 06-11-2009 |