Kionix, Inc. Patent applications |
Patent application number | Title | Published |
20150276532 | CAPACITANCE-BASED PRESSURE SENSOR INCLUDING PRESSURE VESSEL(S) - Techniques are described herein that perform capacitance-based pressure sensing using pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. The void has a shape that is configured to change based on a change of pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel. The pressure vessel may be formed in the shape of an enclosed loop (e.g., along a path that is perpendicular to the cross section), resulting in a looped pressure vessel. For instance, an end of the pressure vessel may be connected to another end of the pressure vessel to form the enclosed loop. | 10-01-2015 |
20140297212 | Systems and Methods for Compensating for a Misalignment Angle Between an Accelerometer and a Magnetometer - A method for compensating for a misalignment angle between an accelerometer and a magnetometer includes applying a corrective rotation to collected accelerometer data or magnetometer data based on an estimated misalignment angle between an axis of the accelerometer and an axis of the magnetometer. The method further includes estimating a gravity vector using the corrected accelerometer data and estimating a magnetic field vector using the corrected magnetometer data. Additionally, the method includes calculating a characteristic that is a function of a calculated angle between the estimated gravity vector and the estimated magnetic field. The method also includes calculating a figure of merit over the plurality of times that is a function of the characteristic, and dynamically adjusting the estimated misalignment angle during ordinary use of the electronic device such that the figure of merit converges to a value as the electronic device rotates. | 10-02-2014 |
20140278191 | Systems and Methods for Calibrating an Accelerometer - A method for calibrating an accelerometer of an electronic device to reduce an error of the accelerometer includes estimating a gravity vector using the accelerometer and a magnetic field vector using a magnetometer at a plurality of times. The method also includes calculating a characteristic that is a function of an angle between the estimated gravity vector and the estimated magnetic field at each of the plurality of times. Additionally, the method includes calculating a figure of merit over the plurality of times that is a function of the characteristic. The method includes dynamically adjusting a calibration parameter of the accelerometer during ordinary use of the electronic device such that the figure of merit is minimized. Adjusting the calibration parameter reduces the error of the accelerometer. A system can include a accelerometer, a magnetometer, a processor, and a memory having instructions to execute the calibration method on the processor. | 09-18-2014 |
20140245810 | SINGLE MOTOR DYNAMIC CALIBRATION UNIT - A calibration unit, system, and method for calibrating a device under test are provided. The calibration unit, system, and method use a single axis rotational unit to calibrate devices under test on a test head. The single axis rotation unit is configured to extend at an angle from a known axis. The test head can be designed in the shape of a frustum with multiple sides. The calibration unit, system, and method can use combinations of gravitational excitation, Helmholtz coil excitation, and rotational rate excitation for calibrating the device under test. The calibration unit, system, and method can calibrate a 3 degree for freedom or higher MEMS devices. | 09-04-2014 |
20140195185 | Angular Velocity Estimation Using a Magnetometer and Accelerometer - A system and method for estimating angular velocity are provided. The system and method use an accelerometer and magnetometer to estimate an angular velocity in place of a gyroscope in 9-axis sensor fusion to estimate angular orientation. The final angular velocity estimate is constructed from two partially independent angular velocity estimates, one using only magnetometer measurements and the other using only accelerometer measurements. The unobservable portion of each partial angular velocity estimate is provided by a projection from a third complete estimate that uses both accelerometer and magnetometer data. | 07-10-2014 |
20130026584 | Micro-Electromechanical System Devices - A micro-electromechanical system (MEMS) device can include a substrate and a first beam suspended relative to a substrate surface. The first beam can include a first portion and a second portion that are separated by an isolation joint made of an insulative material. The first and second portions can each include a first semiconductor and a first dielectric layer. The MEMS device can also include a second beam suspended relative to the substrate surface. The second beam can include a second semiconductor and a second dielectric layer to promote curvature of the second beam. The MEMS device can also include a third beam suspended relative to the substrate surface. The third beam consists essentially of a first material. The second beam is configured to move relative to the third beam in response to an acceleration along an axis perpendicular to the surface of the substrate. | 01-31-2013 |
20120205753 | MICRO-ELECTROMECHANICAL SYSTEM DEVICES AND METHODS OF MAKING MICRO-ELECTROMECHANICAL SYSTEM DEVICES - A micro-electromechanical system (MEMS) device includes a substrate, a first beam, a second beam, and a third beam. The first beam includes first and second portions separated by an isolation joint. The first and second portions each comprise a semiconductor and a first dielectric layer. An electrically conductive trace is mechanically coupled to the first beam and electrically coupled to the second portion's semiconductor but not the first portion's semiconductor. The second beam includes a second dielectric layer. The profile of each of the first, second, and third beams has been formed by a dry etch. A cavity separates a surface of the substrate from the first, second, and third beams. The cavity has been formed by a dry etch. A side wall of each of the first, second, and third beams has substantially no dielectric layer disposed thereon, and the dielectric layer has been removed by a vapor-phase etch. | 08-16-2012 |
20120205752 | Strengthened Micro-Electromechanical System Devices and Methods of Making Thereof - In an embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam, and can have a non-linear shape. In another embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam. The isolation joint can have a first portion, a second portion, and a bridge portion between the first portion and the second portion. The first and second portions of the isolation joint can each have a seam and a void, while the bridge portion can be solid. | 08-16-2012 |
20090056861 | Microfluidic Pump and Valve Structures and Fabrication Methods - Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps. | 03-05-2009 |
20090056822 | Microfluidic Pump and Valve Structures and Fabrication Methods - Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps. | 03-05-2009 |