20090183866 | Thermal control unit for semiconductor testing - A thermal control unit with a heat pipe that conducts heat away from a device under test during burn-in. The heat pipe has a heater that allows control of the rate at which heat is transferred from the DUT to the heat pipe. A sensor and controller are provided to control the heat in response to the measured temperature of the DUT. The sensor and controller control the heater to maintain the surface temperature of the DUT within a specified range. | 07-23-2009 |