Karlsruher Institut fur Technologie (KIT)
Karlsruhe, DE
Karlsruher Institut fur Technologie (KIT) Patent applications | ||
Patent application number | Title | Published |
---|---|---|
20140065060 | Precursors for Metal Organic Chemical Vapor Deposition Processes and Their Use - The present invention relates to a compound of the general formula (I) | 03-06-2014 |