KABUSHIKI KAISKA TOSHIBA
KABUSHIKI KAISKA TOSHIBA Patent applications | ||
Patent application number | Title | Published |
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20110284365 | LANTHANOID ALUMINATE FILM FABRICATION METHOD - A method of fabricating by co-sputtering deposition a lanthanoid aluminate film with enhanced electrical insulativity owing to suppression of deviation in composition of the film is disclosed. Firstly within a vacuum chamber, hold two separate targets, one of which is made of lanthanoid aluminate (LnAlO | 11-24-2011 |