| KABUSHIKI KAISHA TOPCON Patent applications |
| Patent application number | Title | Published |
|---|
| 20120133918 | SURVEYING DEVICE AND COMMUNICATION SYSTEM FOR THE SAME - A surveying device includes a surveying unit configured to measure a direction and a distance to a target object, a control unit configured to control the surveying unit, a communication unit configured to allow the control unit to communicate with an outside network, and a status input unit with which operation status information on the surveying unit is input, wherein the control unit transmits the operation status information input with the status input unit to the outside network via the communication unit. | 05-31-2012 |
| 20120121158 | OPHTHALMIC OBSERVATION APPARATUS - An ophthalmic observation apparatus | 05-17-2012 |
| 20120120485 | INTERFERENCE MICROSCOPE AND MEASURING APPARATUS - In an interference microscope and a measuring device for observing and inspecting the surface and inside of a specimen such as a wafer by applying laser light to the specimen and using an interferometer, a reference optical path for conducting light is provided between a beam splitter and a reference mirror, and a measurement optical path for conducting light is provided between the beam splitter and the specimen, thereby providing an optical path difference between the reference optical path and the measurement optical path. Further, the reference mirror is tilted slightly, thereby forming interference fringes on detection means. It is possible to measure the surface shape of the specimen (measurement object) such as a wafer only by slightly tilting the reference mirror with a simple configuration and locate the accurate coordinate positions of foreign particles and pole pieces. | 05-17-2012 |
| 20120120368 | FUNDUS ANALYZING APPARTUS AND FUNDUS ANALYZING METHOD - A fundus analyzing apparatus | 05-17-2012 |
| 20120113431 | OPTICAL IMAGE MEASUREMENT APPARATUS - A motion detector | 05-10-2012 |
| 20120105824 | Laser Surveying Instrument - A laser surveying instrument comprising a light source unit having two or more light emission sources for emitting pulsed distance measuring lights with different wavelengths, a light projecting unit for projecting the pulsed distance measuring lights with the two or more wavelengths on an optical axis, and a deflection member provided on the optical axis, is disclosed. The deflection member has two or more reflection surfaces which reflect each wavelength of the pulsed distance measuring lights independently, thereby dividing the pulsed distance measuring lights for every wavelength, and deflecting each of the distance measuring lights toward an object to be measured. The instrument comprises a single photodetection element for receiving reflected distance measuring lights from the object to be measured. In the laser surveying instrument, a measurement of distance is performed for every pulsed distance measuring light based on a photodetection signal produced by the photodetection element. | 05-03-2012 |
| 20120081692 | Distance Measuring Instrument - The invention provides a distance measuring instrument, comprising a light emitting unit | 04-05-2012 |
| 20120081691 | Measuring Method And Measuring Instrument - The invention provides the measuring method for performing monitoring measurement on a plurality of measuring points by using a measuring instrument | 04-05-2012 |
| 20120081690 | Measuring Method And Measuring Instrument - The invention provides a measuring instrument, comprising a telescope, a distance measuring unit, an image pickup unit, angle detecting units for detecting a vertical and horizontal angle in the sighting direction, an automatic sighting unit, an arithmetic unit, and a storage unit. The arithmetic unit makes the telescope rotate in horizontal and vertical direction and perform scanning over a predetermined range so that a plurality of objects to be measured are included and makes the image pickup unit acquire digital images during the scanning process. The arithmetic unit detects the objects in the digital images, calculates a vertical and horizontal angle of the objects based on the angle detector and a deviation of each of the objects from sighting axis, associates the calculated angles with each of the objects, and makes the storage unit store the vertical and horizontal angles of the objects as target values for automatic sighting. | 04-05-2012 |
| 20120078451 | Automatic Taking-Off And Landing System - The invention provides an automatic taking-off and landing system, comprising a flying object and a taking-off and landing target, wherein the flying object has an image pickup device | 03-29-2012 |
| 20120057130 | OPHTHALMOLOGIC APPARATUS - Provided is an ophthalmologic apparatus capable of measuring a refractive state in a state where a pupil diameter dimension varies with respect to an eye to be examined, the ophthalmologic apparatus including a measurement optical system capable of measuring distribution of an optical characteristic within a pupil diameter of the eye to be examined, the ophthalmologic apparatus including a visible light illuminator for illuminating the eye to be examined with visible light along an optical axis of the measurement optical system. The visible light illuminator is configured to be capable of changing an illuminating light intensity in a range including at least from a light intensity capable of exposing the eye to be examined to brightness equivalent to that, in a nighttime environment to a light intensity capable of exposing the eye to be examined to brightness equivalent to that in a daytime environment. | 03-08-2012 |
| 20120057021 | Measuring Method And Measuring Device - The invention provides a measuring device, comprising a distance measuring unit | 03-08-2012 |
| 20120044456 | FUNDUS OBSERVATION APPARATUS - The controller | 02-23-2012 |
| 20120033181 | FUNDUS OBSERVATION APPARATUS - The fundus observation apparatus | 02-09-2012 |
| 20120013917 | Measuring Device - The present invention provides a measuring device, comprising a light source unit | 01-19-2012 |
| 20120013915 | OPTICAL IMAGE MEASUREMENT DEVICE - An optical image measurement device comprises: a light amount adjustment part that adjusts the light amount of a laser beam generated by a low coherence light source | 01-19-2012 |
| 20120012350 | Surveying System And Laser Reference Plane Smoothing Method In Surveying System - A surveying system comprises a plurality of rotary laser devices ( | 01-19-2012 |
| 20110315877 | Electron Microscope Device - The present invention provides an electron microscope device, comprising a scanning electron microscope | 12-29-2011 |
| 20110292362 | Exposure apparatus - An exposure apparatus which forms a predetermined mask pattern on a target workpiece through exposure by: casting exposure light upon a mask in which the pattern and a mask-side alignment mark are formed, and forming an image of the mask on the target workpiece by projecting the exposure light, which passes the mask, on the target workpiece through a projection lens, includes: an alignment lighting unit configured to cast, as alignment light, light in a wavelength range included in the exposure light onto the mask-side alignment mark of the mask; and an alignment camera unit including an image pickup device for capturing images, and configured to receive the incident alignment light coming from the alignment lighting unit through the mask and the projection lens. | 12-01-2011 |
| 20110292361 | Exposure apparatus - An exposure apparatus including a warp deformation forming mechanism having a plane-parallel plate for warp deformation provided on a projection optical path of a mask pattern to be projected to a work substrate, and configured to be deformed by warping, a restraint member configured to cause an intermediate part of the plane-parallel plate between neighboring two of corner parts to serve as a fulcrum, each corner part formed by two intersecting sides of the plane-parallel plate, and a pressure member configured to warp and deform the plane-parallel plate with the restraint member used as a fulcrum by applying a pressurizing force to the corner parts of the plane-parallel plate in an optical axis direction of the projection optical path. | 12-01-2011 |
| 20110286003 | OPTICAL IMAGE MEASURING DEVICE - An optical image measuring device includes: an optical system that generates and detects interference light; an image forming part that forms a tomographic image based on the detection; an alignment part that performs alignment of the optical system with respect to an object; a focusing part that focuses the optical system with respect to the region of interest; a determining part that determines the suitability of the position of the optical system by the alignment part, the suitability of the focus state by the focusing part, and the suitability of the position of the tomographic image in a frame; a control part that, when it is determined that all of the positions of the optical system, position of focus state and the position in said frame are appropriate, controls the optical system and the image forming part, making it possible to obtain the tomographic image of the region of interest. | 11-24-2011 |
| 20110270563 | Electro-Optical Distance Measuring Method And Electro-Optical Distance Measuring Device - The present invention provides an electro-optical distance measurement, wherein a light from a light source ( | 11-03-2011 |
| 20110267583 | OPTICAL IMAGE MEASURING DEVICE AND CONTROL METHOD THEREOF - A low-coherence light is split into a signal light and a reference light. The optical path length of the reference light is switched to optical path lengths that correspond to a first depth zone and a second depth zone. When forming a tomographic image of the second depth zone, in an optical system that condenses the signal light to the first depth zone when a measured object and an objective lens are located at a predetermined working distance, while being positioned at the working distance, a depth zone switching lens that transitions the depth at which the signal light is condensed to the second depth zone is inserted. | 11-03-2011 |
| 20110266468 | EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS - An extreme ultraviolet light source apparatus comprises a target supply unit supplying a target into a vacuum chamber, a laser oscillator outputting a laser light into the vacuum chamber, a collector mirror outputting an extreme ultraviolet light outside by reflecting the extreme ultraviolet light emitted from the target being ionized as a plasma by irradiation with the laser light at a plasma luminescence point in the vacuum chamber, and an ion debris removal unit at least a part of which is located in an obscuration region including the plasma luminescence point. | 11-03-2011 |
| 20110261368 | Laser Scanner - The invention provides a laser scanner | 10-27-2011 |
| 20110242488 | OPHTHALMIC MEASUREMENT APPARATUS - Provided is an ophthalmic measurement apparatus capable of quickly transferring from measurement of ocular characteristics of one eye to measurement of ocular characteristics of the other eye. An ophthalmic measurement apparatus | 10-06-2011 |
| 20110169948 | Electro-Optical Distance Measuring Device - An electro-optical distance measuring device having a photodetection unit comprising a plurality of pixels arranged in a predetermined arrangement is disclosed. A signal processing unit has a storage unit for storing the detection result in correspondence with each of the pixels, wherein the signal processing control unit sequentially changes a position of the division for every cycle wave at which the photodetection amount is detected and continues detections until a detected range becomes at least one cycle or more. The arithmetic processing unit calculates a waveform for at least one cycle stored in the storage unit for each pixel, obtains a phase difference of the waveform with respect to the irradiated distance measuring light, and calculates the distance based on the phase difference. | 07-14-2011 |
| 20110158475 | Position Measuring Method And Position Measuring Instrument - The present invention provides a position measuring instrument, comprising a GPS position detecting device | 06-30-2011 |
| 20110096319 | GEOGRAPHIC DATA COLLECTING SYSTEM - A geographic data collecting system, comprising a distance measuring unit for projecting a distance measuring light and for measuring a distance to an object to be measured, a camera for taking an image in measuring direction, a display unit for displaying the pickup image, a touch panel provided to correspond to a screen position of the display unit, a tilt sensor for detecting a tilting of the measuring direction, and an arithmetic unit for calculating a distance to the object to be measured by giving consideration on the tilting in the measuring direction and a point-to-point distance as specified on the image by specifying two or more points of the object to be measured on a displayed image via the touch panel. | 04-28-2011 |
| 20110080596 | Measuring Method And Measuring Device - The invention provides a measuring method for installing a measuring rod | 04-07-2011 |
| 20110080561 | OPTICAL IMAGE MEASURING DEVICE - An optical image measuring device | 04-07-2011 |
| 20110051088 | FUNDUS OCULI OBSERVING DEVICE - A fundus oculi observing device 1 specifies a characteristic site of a fundus oculi Ef depicted in tomographic images of the fundus oculi Ef and, based on the position of the characteristic site within frames FH and FV of the tomographic images, changes a target position of a signal light LS so that the characteristic site is depicted in the center positions within the frames FH and FV and executes a main measurement, thereby forming a tomographic image and/or a three-dimensional image of the fundus oculi Ef. | 03-03-2011 |
| 20100328608 | STEREOMICROSCOPE - In intraocular observation of the eye, the slit lamp microscope | 12-30-2010 |
| 20100245587 | Automatic tracking method and surveying device - The present invention provides an automatic tracking method, comprising a light spot detecting step of detecting a light spot | 09-30-2010 |
| 20100229409 | Surveying system - The present invention relates to a surveying system, comprising a rotary laser irradiation device | 09-16-2010 |
| 20100194757 | FUNDUS OCULI OBSERVATION DEVICE, OPHTHALMOLOGIC IMAGE PROCESSING DEVICE, AND PROGRAM - A fundus oculi observation device capable of defining which part in the result of analysis of the layer thickness of a fundus oculi is a part obtained by analyzing a vascular region is provided. A fundus oculi observation device | 08-05-2010 |
| 20100188502 | Optical image measurement device - A fundus oculi observation device acts as an optical image measurement device capable of measuring an OCT image such as a tomographic image of a fundus oculi, or the like, and is configured so as to calculate the signal level of the formed OCT image, determine whether the signal level exceeds a threshold value, and change the position of a reference mirror so that the signal level is determined to exceed the threshold value. | 07-29-2010 |
| 20100182567 | FUNDUS OCULI OBSERVATION DEVICE AND PROGRAM CONTROLLING THE SAME - [Task] To provide a fundus oculi observation device capable of effectively performing dispersion compensation. | 07-22-2010 |
| 20100163729 | Electron microscope device - The present invention provides an electron microscope device, comprising a scanning electron microscope | 07-01-2010 |
| 20100163728 | Electron microscope device - The present invention provides an electron microscope device | 07-01-2010 |
| 20100149489 | FUNDUS OCULI OBSERVATION DEVICE AND PROGRAM FOR CONTROLLING THE SAME - A fundus oculi observation device | 06-17-2010 |
| 20100134802 | OPTICAL IMAGE MEASURING DEVICE - An optical image measurement device | 06-03-2010 |
| 20100128960 | CORNEA OBSERVATION DEVICE - An object is to allow grasp of a depth position of a corneal image. A cornea observation device | 05-27-2010 |
| 20100110375 | OPTICAL IMAGE MEASUREMENT DEVICE - A device 1 is an OCT device that splits a low-coherence light L | 05-06-2010 |
| 20100079874 | Anamorphic optical system, image pickup device, on-board type camera and monitoring camera - The present invention provides an anamorphic optical system | 04-01-2010 |
| 20100077627 | LENS SHAPE MEASURING METHOD AND LENS SHAPE MEASURING APPARATUS - A lens shape measuring method includes: bringing a feeler into contact with an outer peripheral surface of a spectacle lens, the outer peripheral surface corresponding to a lens shape of spectacles, the feeler being rotatable about a rotation axis and movable forward and backward relative to the rotation axis in a radial direction, and, while keeping the contact state, moving the feeler along a contact surface of the feeler with the lens shape in a circumferential direction, to measure radii ρi (i=0,1,2, . . . n) of the lens shape over an entire circumference of thereof, the radii ρi representing change in distance from a geometric center of the lens shape to the feeler, a measurement region of the lens shape being divided into multiple sub-regions, and within each of the sub-regions, the rotation axis line being moved to a position to cause the feeler to measure the lens shape within the sub-region. | 04-01-2010 |
| 20100064533 | SPECTACLE LENS FRAME SHAPE MEASURING APPARATUS - A spectacle lens frame shape measuring apparatus includes a holding device including upper pins and lower pins respectively holding upper rims and lower rims of frames for a spectacle lens, the upper pins holding the frames at different positions in a right-left direction from the positions at which the lower pins hold the frames and being placed at a same height as the lower pins in a vertical direction, a probe brought into contact with lens fitting grooves of the frames held by the holding device, a swinging mechanism swinging the holding device around a predetermined virtual axis, and a calculation controller calculating an axial shift amount or angle of the frames held by the holding device on the basis of a carved angle of the frames and an inclination angle of any one of the upper and lower rims, and correcting a shape of the frames obtained by the probe in accordance with the calculated axial shift amount or angle. | 03-18-2010 |
| 20100039616 | OPTICAL IMAGE MEASUREMENT DEVICE AND PROGRAM FOR CONTROLLING THE SAME - A fundus oculi observation device | 02-18-2010 |
| 20100007872 | SURFACE INSPECTING METHOD AND DEVICE - A light source section outputs optical flux having two types of wavelength, which are a short wavelength and a long wavelength, while the intensity is made variable. The optical flux is made incident to a detected surface of a body to be detected at a predetermined incident angle simultaneously or alternatively. Based on a type of optical flux outputted from the light source section and an output from a first light intensity detecting section, at least the intensity of the optical flux having a long wavelength outputted from the light source section is adjusted. The output from the first light intensity detecting section in irradiating the optical flux having a short wavelength is compared with the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength. A signal that appears only in the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength is identified as a detected signal from an internal subject. The intensity of optical flux having a long wavelength is adjusted. A disappearance level near a point where the detected signal from the internal subject disappears is calculated. The first intensity of optical flux having a long wavelength is set to level higher than the disappearance level. Based on the output from the first light intensity detecting section obtained by the optical flux having a long wavelength of the first intensity, a subject inside the body to be detected is measured. | 01-14-2010 |
| 20090282688 | SHAPE MEASURING APPARATUS AND METHOD FOR EYEGLASS ELEMENT - A shape measuring apparatus for eyeglass element is configured to three-dimensionally measures an inner circumferential contour shape of an eyeglass element. The apparatus includes a holder which holds the eyeglass element; a measuring element which traces a shape of the eyeglass element; a driver for the measuring element; a position detector which detects a position of the measuring element; an arithmetic controller which processes positional data on the measuring element and controls the driver to slide the measuring element, a moving amount detector which detects a moving amount of the measuring element per unit time when the measuring element moves towards the measuring element; and a movement controller which controls the measuring element to move at a desirable speed which corresponds to the moving amount per unit time detected by the moving amount detector. | 11-19-2009 |
| 20090244668 | METHOD OF DRIVING MEMS MIRROR SCANNER, METHOD OF DRIVING MEMS ACTUATOR SCANNER AND METHOD OF CONTROLLING ROTATION ANGLE OF MEMS ACTUATOR - A method of driving a MEMS mirror scanner having an electrostatic actuator, comprising a step of driving the electrostatic actuator according to an input signal in accordance with a driving waveform obtained by the following equation, | 10-01-2009 |
| 20090207378 | Ophthalmologic apparatus - An ophthalmologic apparatus has a setting part configured to acquire position information of a first examining part at the time of execution of a first examination and set a movable range of a second examining part in a direction of a second working distance based on the position information and distance information. This ophthalmologic apparatus controls so that an examining unit moves within the movable range set based on the position information of the first examining part and the distance information when an examination by the examining unit is switched from the first examination to a second examination. | 08-20-2009 |
| 20090168021 | Ophthalmologic apparatus - An opthalmologic apparatus has an examination unit including a plurality of examining parts for executing different examinations on an eye to and a driver moving the examination unit in the horizontal direction and in the anteroposterior direction. The opthalmologic apparatus controls the driver when switching a examination subject by the examination unit from one eye to the other eye to cause the examination unit to retreat by only a retreating distance according to the working distance of an examination part positioned at the examination position for the one eye. The examination unit retreats by only a distance according to the working distance. Therefore, it is possible to achieve both reductions in examination time and improvements for safety by preventing an examining part comes into contact with the patient. | 07-02-2009 |
| 20090161946 | IMAGE PROCESSING APPARATUS - An image processing apparatus comprises an inputting section for inputting a plurality of continuous images which were photographed by a photographing section progressively moving relative to a photographed object; an extracting section for extracting characteristic points from images input by the inputting section; a tracking section for tracking the points corresponding to the characteristic points in the plurality of continuous images; an embedding section for embedding tracking data, which includes data of extracted and tracked points by the extracting section and the tracking section, into each image; and an outputting section for outputting the plurality of continuous images sequentially in which the tracking data was embedded by the embedding section. | 06-25-2009 |
| 20090161119 | MIXING APPARATUS AND DISTANCE MEASURING APPARATUS USING SAME - For the purpose of mixing laser light (P | 06-25-2009 |
| 20090153873 | Optical Image Measuring Apparatus - Provided is an optical image measuring apparatus capable of obtaining a high-accuracy image without being influenced by a movement of an object to be measured. Flash light is emitted from a xenon lamp ( | 06-18-2009 |
| 20090128930 | Optical axis tilting device for laser optical system - An optical axis tilting device for laser optical system is configured to include a lens barrel in which a laser optical system is disposed; a tilt frame provided with a tilt sensor, a tilt mechanism including a drive motor, a threaded shaft, a movable member, and a position detector; a leveling mechanism; a ball joint mechanism including a ball support portion in the lens barrel, a ball portion made of a magnetic material and supported between the ball support portion and the tilt frame, a conical recess formed in one of the ball support portion and the tilt frame, and a permanent magnet provided in the one of the ball support portion and the tilt frame; and a computing portion. | 05-21-2009 |
| 20090122398 | Surgical microscope apparatus - A surgical microscope apparatus | 05-14-2009 |
| 20090122296 | Time Difference Measuring Device, Measuring Method, Distance Measuring Device, and Distance Measuring Method - A time difference measuring device can accurately measure a time difference between two pulse signals generated with a predetermined time difference by measuring the two pulse signals by one measurement. The time difference measuring device measures a time difference between a start signal (M | 05-14-2009 |
| 20090116102 | Stereomicroscope - An illumination optical system projects an illumination light onto an observation object via an objective lens. A first observation optical system guides the illumination light reflected by the observation object to a first ocular lens. A second observation optical system includes a second ocular lens for observing the reflected light of the illumination light. An optical system drive mechanism rotates the second observation optical system and arranges the second observation optical system between a first position and second position facing each other. A reflecting member is disposed at a position retracted from the illumination light path and the reflected light path and reflects the reflected light in a direction different from the optical axis. A drive mechanism rotates the reflecting member around a rotation axis orthogonal to the optical axis and guides the reflected light to the second observation optical system arranged at the first or second position. | 05-07-2009 |
| 20090110521 | Wafer holder - A wafer holder is provided which includes a holder body with a chuck table having a ring-like wafer receptacle, and a plurality of fixing portions fixing a wafer on the wafer receptacle to hold the wafer, and a carrier supporting the wafer before fixed on the wafer receptacle from downward. The holder body includes a carrier support portion which forms a support face to support the carrier and be changeable in height from an original position, and positions the support face on which the wafer is placed at a delivery position. The carrier support portion separates the wafer from the carrier by lowering the support face from the delivery position, so that the fixing portions fix the wafer. | 04-30-2009 |
| 20090038504 | POLISHING SLURRY FOR IONIC MATERIALS - A polishing slurry is disclosed, which is to be used for polishing an ionic material, the polishing slurry including a dispersant which is to form a nonionic adsorbing layer on a surface of the ionic material. The dispersant may be selected by separately preparing first and second solutions containing first and second different dispersants, immersing test pieces each made of said ionic material into the first and second solutions, respectively, comparing a step between an etched portion and a non-etched portion of the test piece immersed in the first solution with a step between an etched portion and a non-etched portion of the test piece immersed in the second solution, and selecting the dispersant used in the solution in which the test piece having the smaller step is immersed. | 02-12-2009 |
| 20090015790 | Surgical microscope apparatus - A drive unit | 01-15-2009 |
| 20080297921 | Optical axis tilting device of laser optical system - An optical axis tilting device of a laser optical system, includes a lens barrel inside of which provided with a laser optical system; a tilt frame supported at the lens barrel; a tilt sensor which is provided at the tilt frame and is configured to detect a preset reference position of the tilt frame; a fixed frame fixed to the lens barrel and provided with a tilting mechanism which tilts the tilt frame relative to a horizontal plane; a leveling mechanism which supports the lens barrel tiltably, and tilts the lens barrel so as to detect the reference position by the tilt sensor and then levels the tilt frame; a feed screw which is rotatably driven by a driving motor; a feed piece which is reciprocated by the feed screw and engages with the tilt frame and tilts the tilt frame relative to the reference position; a piece position detection device configured to detect a position of the feed piece; and a computing device configured to calculate a tilting angle based on the position of the feed piece detected by the piece position detection device. | 12-04-2008 |
| 20080231794 | Jig Mounting Apparatus - A jig mounting apparatus has a detection optical system that detects reference marker of an eyeglass lens, is configured so as to determine an mounting point based on the reference marker detected by the detection optical system and position the mounting center of jig, which is used in processing the eyeglass lens, on the mounting point to mount the jig on the surface of the eyeglass lens, in which the detection optical system includes: a focusing optical system that focuses a light-emitting optical flux from a light source on the surface of the eyeglass lens, where hidden marks are formed, via an aperture stop; a reflection plate that reflects an optical flux focused by the focusing optical system and passed through the eyeglass lens; and an imaging device that is provided on a position optically approximately conjugate with the aperture stop and configured to focus on a space portion along an optical axis direction from the surface of the eyeglass lens. | 09-25-2008 |
| 20080208525 | OPTICAL IMAGE MEASUREMENT DEVICE - An optical image measurement device comprises: a controller configured to control the scanner to scan the target position along a plurality of radially-arranged scanning lines; and an image forming part configured to form a tomographic image on each of the plurality of scanning lines based on the result detected by the detector, and form a 3-dimensional image of the measurement object based on the plurality of tomographic images having been formed. | 08-28-2008 |
| 20080204723 | Mask defect inspection apparatus - The mask defect inspection apparatus including an illumination optical system for illuminating a mask on which a pattern is formed; an objective lens facing the mask; at least a pair of detection optical systems having a detection sensor for obtaining an image of the pattern, respectively, and which receive illumination light from illumination areas different from each other through the objective lens, respectively; and focusing changing means for changing a position of focusing between sites of the pattern in a film-thickness direction of the mask and the pattern images obtained by the detection sensors, such that the pattern images obtained by the detection sensors are changed corresponding to the film-thickness direction of the mask. | 08-28-2008 |
| 20080204661 | DEFORMABLE MIRROR DEVICE AND APPARATUS FOR OBSERVING RETINA OF EYE - It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided around the opening on the first face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite to the electrodes. | 08-28-2008 |
